Invention Grant
- Patent Title: Showerhead having a detachable gas distribution plate
-
Application No.: US13833257Application Date: 2013-03-15
-
Publication No.: US09610591B2Publication Date: 2017-04-04
- Inventor: Dmitry Lubomirsky , Vladimir Knyazik , Hamid Noorbakhsh , Jason Della Rosa , Zheng John Ye , Jennifer Y. Sun , Sumanth Banda
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: B05B1/00
- IPC: B05B1/00 ; H01J37/32 ; C23C16/455

Abstract:
Embodiments of showerheads having a detachable gas distribution plate are provided herein. In some embodiments, a showerhead for use in a semiconductor processing chamber may include a base having a first side and a second side; a gas distribution plate disposed proximate the second side of the base; a clamp disposed about a peripheral edge of the gas distribution plate to removably couple the gas distribution plate to the base; and a thermal gasket disposed between the base and gas distribution plate.
Public/Granted literature
- US20140209027A1 SHOWERHEAD HAVING A DETACHABLE GAS DISTRIBUTION PLATE Public/Granted day:2014-07-31
Information query