Invention Grant
- Patent Title: Scanning transmission electron microscope with variable axis objective lens and detective system
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Application No.: US14940102Application Date: 2015-11-12
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Publication No.: US09613779B2Publication Date: 2017-04-04
- Inventor: Shuai Li , Wei He , Zhongwei Chen
- Applicant: Shuai Li , Wei He , Zhongwei Chen
- Applicant Address: CN Ningbo
- Assignee: NINGBO FOCUS-EBEAM INSTRUMENTS INC.
- Current Assignee: NINGBO FOCUS-EBEAM INSTRUMENTS INC.
- Current Assignee Address: CN Ningbo
- Agency: United States Research and Patent Firm
- Agent Guosheng Wang
- Main IPC: H01J37/21
- IPC: H01J37/21 ; H01J37/145 ; H01J37/147 ; H01J37/28
Abstract:
The present invention provides a scanning transmission electron microscope (STEM). In the STEM, a specimen is sandwiched between a variable axis objective lens and a variable axis collection lens. The axis of the collection lens varies along with the variation of the objective lens axis in a coordinated manner. The STEM of the invention exhibits technical merits such as large scanning field, high image resolution across the entire scanning field, and high throughput, among others.
Public/Granted literature
- US20160351371A1 SCANNING TRANSMISSION ELECTRON MICROSCOPE WITH VARIABLE AXIS OBJECTIVE LENS AND DETECTIVE SYSTEM Public/Granted day:2016-12-01
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