公开(公告)号：US20160351371A1

公开(公告)日：2016-12-01

申请号：US14940102

申请日：2015-11-12

Applicant: Shuai Li ,  Wei He ,  Zhongwei Chen

Inventor： Shuai Li ,  Wei He ,  Zhongwei Chen

IPC: H01J37/145 ,  H01J37/28 ,  H01J37/21 ,  H01J37/147

CPC classification number: H01J37/145 ,  H01J37/1477 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/0473 ,  H01J2237/2802

Abstract: The present invention provides a scanning transmission electron microscope (STEM). In the STEM, a specimen is sandwiched between a variable axis objective lens and a variable axis collection lens. The axis of the collection lens varies along with the variation of the objective lens axis in a coordinated manner. The STEM of the invention exhibits technical merits such as large scanning field, high image resolution across the entire scanning field, and high throughput, among others.

Abstract translation: 本发明提供扫描透射电子显微镜（STEM）。 在STEM中，将样本夹在可变轴物镜和可变轴收集透镜之间。 收集透镜的轴线随着物镜轴的协调变化而变化。 本发明的STEM具有如扫描场大，整个扫描场的高图像分辨率，高通量等技术优点。

公开(公告)号：US09613779B2

公开(公告)日：2017-04-04

申请号：US14940102

申请日：2015-11-12

Applicant: Shuai Li ,  Wei He ,  Zhongwei Chen

Inventor： Shuai Li ,  Wei He ,  Zhongwei Chen

IPC: H01J37/21 ,  H01J37/145 ,  H01J37/147 ,  H01J37/28

CPC classification number: H01J37/145 ,  H01J37/1477 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/0473 ,  H01J2237/2802

Abstract: The present invention provides a scanning transmission electron microscope (STEM). In the STEM, a specimen is sandwiched between a variable axis objective lens and a variable axis collection lens. The axis of the collection lens varies along with the variation of the objective lens axis in a coordinated manner. The STEM of the invention exhibits technical merits such as large scanning field, high image resolution across the entire scanning field, and high throughput, among others.