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    Electron beam apparatus
    3.
    发明授权
    Electron beam apparatus 有权
    电子束装置

    公开(公告)号：US07960697B2

    公开(公告)日：2011-06-14

    申请号：US12257304

    申请日：2008-10-23

    申请人： Zhongwei Chen ,  Weiming Ren ,  Joe Wang ,  Xuedong Liu ,  Juying Dou ,  Fumin He ,  Feng Cao ,  Yan Ren ,  Xiaoli Guo ,  Wei He ,  Qingpo Xi

    发明人： Zhongwei Chen ,  Weiming Ren ,  Joe Wang ,  Xuedong Liu ,  Juying Dou ,  Fumin He ,  Feng Cao ,  Yan Ren ,  Xiaoli Guo ,  Wei He ,  Qingpo Xi

    IPC分类号： H01J49/44

    CPC分类号： H01J37/073 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/06341 ,  H01J2237/24592

    摘要： The present invention relates to a charged particle beam apparatus which employs a scanning electron microscope for sample inspection and defect review.The present invent provides solution of improving imaging resolution by utilizing a field emission cathode tip with a large tip radius, applying a large accelerating voltage across ground potential between the cathode and anode, positioning the beam limit aperture before condenser lens, utilizing condenser lens excitation current to optimize image resolution, applying a high tube bias to shorten electron travel time, adopting and modifying SORIL objective lens to ameliorate aberration at large field of view and under electric drifting and reduce the urgency of water cooling objective lens while operating material analysis.The present invent provides solution of improving throughput by utilizing fast scanning ability of SORIL and providing a large voltage difference between sample and detectors.

    摘要翻译： 本发明涉及采用扫描电子显微镜进行样品检查和缺陷检查的带电粒子束装置。 本发明提供了通过利用具有大的尖端半径的场致发射阴极尖端来提高成像分辨率的解决方案，在阴极和阳极之间的地电位上施加大的加速电压，将光束极限孔定位在聚光透镜之前，利用聚光透镜激发电流 优化图像分辨率，应用高管偏压缩短电子行进时间，采用和修正SORIL物镜，以改善大视野和电漂移下的像差，并减少水冷物镜在操作材料分析时的紧迫性。 本发明提供了通过利用SORIL的快速扫描能力并在样品和检测器之间提供大的电压差来提高产量的解决方案。

    METHOD FOR PRODUCING FEW-LAYER GRAPHENE
    7.
    发明申请
    METHOD FOR PRODUCING FEW-LAYER GRAPHENE 审中-公开
    生产薄层石墨的方法

    公开(公告)号：US20150376013A1

    公开(公告)日：2015-12-31

    申请号：US14654215

    申请日：2013-12-20

    申请人： Aiping YU ,  Victor CHABOT ,  Zhongwei CHEN

    发明人： Aiping Yu ,  Victor Chabot ,  Zhongwei Chen

    IPC分类号： C01B31/04

    CPC分类号： C01B31/0469 ,  C01B32/19 ,  C01B2204/02 ,  C01B2204/04

    摘要： A method of producing single or few-layer graphene comprises exfoliating graphite with a polymer to form a graphene-polymer composite and subsequently treating the composite to disassociate graphene. The exfoliation process is conducted using sonication. The graphene is disassociated from the polymer by a treatment step such as acid hydrolysis. The method results in highly pure graphene.

    摘要翻译： 生产单层或几层石墨烯的方法包括用聚合物去除石墨以形成石墨烯 - 聚合物复合材料，随后处理复合材料以分离石墨烯。 剥离过程使用超声处理进行。 石墨烯通过诸如酸水解的处理步骤与聚合物分离。 该方法产生高纯度石墨烯。

    Platinum and platinum based alloy nanotubes as electrocatalysts for fuel cells
    8.
    发明授权
    Platinum and platinum based alloy nanotubes as electrocatalysts for fuel cells 有权
    铂和铂基合金纳米管作为燃料电池的电催化剂

    公开(公告)号：US09214680B2

    公开(公告)日：2015-12-15

    申请号：US12224197

    申请日：2007-02-24

    申请人： Yan Yushan ,  Zhongwei Chen

    发明人： Yan Yushan ,  Zhongwei Chen

    IPC分类号： B01J23/56 ,  H01M4/92 ,  C22C5/04 ,  H01M4/88 ,  H01M8/10

    CPC分类号： H01M4/92 ,  C22C5/04 ,  H01M4/8814 ,  H01M4/921 ,  H01M4/928 ,  H01M2008/1095 ,  Y02E60/50 ,  Y02E60/523

    摘要： Electrocatalyst durability has been recently recognized as one of the most important issues that have to be addressed before the commercialization of the proton exchange membrane fuel cells (PEMFCs). The present invention is directed to a new class of cathode catalysts based on supportless platinum nanotubes (PtNTs) and platinum alloy nanotubes, for example, platinum-palladium nanotubes (PtPdNTs), that have remarkable durability and high catalytic activity. Due to their unique combination of dimensions at multiple length scales, the platinum nanotubes of the present invention can provide high platinum surface area due to their nanometer-sized wall thickness, and have the potential to eliminate or alleviate most of the degradation pathways of the commercial carbon supported platinum catalyst (Pt/C) and unsupported platinum-black (PtB) as a result of their micrometer-sized length. The platinum nanotube catalysts of the present invention asymptotically approach a maximum of about twenty percent platinum surface area loss in durability test, while the commercial PtB and Pt/C catalysts lose about fifty-one percent and ninety percent of their initial surface area, respectively. Moreover, the PtNT and PtPdNT catalysts of the present invention show higher mass activity and much higher specific activity than commercial Pt/C and PtB catalysts.

    摘要翻译： 电催化剂耐久性最近被认为是在质子交换膜燃料电池（PEMFC）商业化之前必须解决的最重要的问题之一。 本发明涉及一类新型的基于无支撑铂纳米管（PtNTs）和铂合金纳米管（例如铂 - 钯纳米管（PtPdNTs））的阴极催化剂，其具有显着的耐久性和高催化活性。 由于它们在多个长度尺度上的独特的尺寸组合，本发明的铂纳米管由于其纳米尺寸的壁厚可以提供高的铂表面积，并且具有消除或减轻商业的大部分降解途径的潜力 碳负载的铂催化剂（Pt / C）和无支撑的铂黑（PtB），由于其微米尺寸的长度。 本发明的铂纳米管催化剂在耐久性试验中渐近地接近约百分之二十的铂表面积损失，而商业PtB和Pt / C催化剂分别损失其初始表面积的百分之五十一和百分之九十。 此外，本发明的PtNT和PtPdNT催化剂显示比商业Pt / C和PtB催化剂更高的质量活性和更高的比活性。

    Movable detector for charged particle beam inspection or review
    9.
    发明授权
    Movable detector for charged particle beam inspection or review 有权
    用于带电粒子束检测或检查的可移动检测器

    公开(公告)号：US08624186B2

    公开(公告)日：2014-01-07

    申请号：US12787139

    申请日：2010-05-25

    申请人： Yi-Xiang Wang ,  Joe Wang ,  Xuedong Liu ,  Zhongwei Chen

    发明人： Yi-Xiang Wang ,  Joe Wang ,  Xuedong Liu ,  Zhongwei Chen

    IPC分类号： H01J37/244

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24495 ,  H01J2237/2611 ,  H01J2237/2817

    摘要： The present invention generally relates to a detection unit of a charged particle imaging system. More particularly, portion of the detection unit can move into or out of the detection system as imaging condition required. With the assistance of a Wein filter (also known as an E×B charged particle analyzer) and a movable detector design, the present invention provides a stereo imaging system that suitable for both low current, high resolution mode and high current, high throughput mode. Merely by way of example, the invention has been applied to a scanning electron beam inspection system. But it would be recognized that the invention could apply to other system using charged particle beam as an observation tool.

    摘要翻译： 本发明一般涉及带电粒子成像系统的检测单元。 更具体地，检测单元的一部分可以作为所需的成像条件移入或移出检测系统。 在Wein滤波器（也称为E×B带电粒子分析仪）和可移动检测器设计的帮助下，本发明提供了一种适用于低电流，高分辨率模式和高电流，高通量模式的立体成像系统 。 仅作为示例，本发明已经应用于扫描电子束检查系统。 但是应当认识到，本发明可以应用于使用带电粒子束作为观测工具的其它系统。

    CARBON BASED ELECTROCATALYSTS FOR FUEL CELLS
    10.
    发明申请
    CARBON BASED ELECTROCATALYSTS FOR FUEL CELLS 审中-公开
    用于燃料电池的基于碳的电解质

    公开(公告)号：US20130164652A1

    公开(公告)日：2013-06-27

    申请号：US13478901

    申请日：2012-05-23

    申请人： Yushan Yan ,  Xin Wang ,  Wenzhen Li ,  Mahesh Waje ,  Zhongwei Chen ,  William Goddard ,  Wei-Qiao Deng

    发明人： Yushan Yan ,  Xin Wang ,  Wenzhen Li ,  Mahesh Waje ,  Zhongwei Chen ,  William Goddard ,  Wei-Qiao Deng

    IPC分类号： H01M8/10

    CPC分类号： H01M4/881 ,  H01M4/8605 ,  H01M4/92 ,  H01M4/926 ,  H01M8/1004 ,  H01M8/1011 ,  Y02E60/523

    摘要： Novel proton exchange membrane fuel cells and direct methanol fuel cells with nanostructured components are configured with higher precious metal utilization rate at the electrodes, higher power density, and lower cost. To form a catalyst, platinum or platinum-ruthenium nanoparticles are deposited onto carbon-based materials, for example, single-walled, dual-walled, multi-walled and cup-stacked carbon nanotubes. The deposition process includes an ethylene glycol reduction method. Aligned arrays of these carbon nanomaterials are prepared by filtering the nanomaterials with ethanol. A membrane electrode assembly is formed by sandwiching the catalyst between a proton exchange membrane and a diffusion layer that form a first electrode. The second electrode may be formed using a conventional catalyst. The several layers of the MEA are hot pressed to form an integrated unit. Proton exchange membrane fuel cells and direct methanol fuel cells are developed by stacking the membrane electrode assemblies in a conventional manner.

    摘要翻译： 新型质子交换膜燃料电池和具有纳米结构组分的直接甲醇燃料电池配置在电极上的贵金属利用率更高，功率密度更高，成本更低。 为了形成催化剂，将铂或铂 - 钌纳米颗粒沉积在碳基材料上，例如单壁，双壁，多壁和杯堆叠碳纳米管。 沉积工艺包括乙二醇还原法。 通过用乙醇过滤纳米材料来制备这些碳纳米材料的对准阵列。 通过将催化剂夹在质子交换膜和形成第一电极的扩散层之间形成膜电极组件。 第二电极可以使用常规的催化剂形成。 MEA的几层被热压形成一个集成的单元。 质子交换膜燃料电池和直接甲醇燃料电池通过以常规方式堆叠膜电极组件来开发。