发明授权
- 专利标题: Fullerenes
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申请号: US14899278申请日: 2014-05-21
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公开(公告)号: US09632409B2公开(公告)日: 2017-04-25
- 发明人: Alex Phillip Graham Robinson , Richard Edward Palmer , Andreas Frommhold , Dongxu Yang
- 申请人: Alex Phillip Graham Robinson , Richard Edward Palmer , Andreas Frommhold , Dongxu Yang
- 申请人地址: GB Chelhydra Walk, Maritime Quarter, Swansea, Wales
- 专利权人: Irresistible Materials LTD
- 当前专利权人: Irresistible Materials LTD
- 当前专利权人地址: GB Chelhydra Walk, Maritime Quarter, Swansea, Wales
- 代理机构: The Patent Practice of Szmanda & Shelnut LLC
- 代理商 James G. Shelnut; Charles R. Szmanda
- 国际申请: PCT/US2014/038997 WO 20140521
- 国际公布: WO2014/190070 WO 20141127
- 主分类号: G03F7/027
- IPC分类号: G03F7/027 ; G03F7/004 ; C07C69/753 ; C07C69/96 ; H01L51/00 ; G03F7/038 ; G03F7/039 ; C07D401/14 ; C07D401/04
摘要:
The present disclosure relates to novel fullerene derivatives, positive and negative photoresist compositions prepared therefrom and methods of using them. The derivatives, their photoresist compositions and the methods are ideal for high speed, fine pattern processing using, for example, ultraviolet radiation, extreme ultraviolet radiation, beyond extreme ultraviolet radiation, X-rays, electron beam and other charged particle rays.
公开/授权文献
- US20160139506A1 FULLERENES 公开/授权日:2016-05-19
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