Invention Grant
- Patent Title: Method of forming a composite substrate
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Application No.: US13877549Application Date: 2011-10-26
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Publication No.: US09634181B2Publication Date: 2017-04-25
- Inventor: Nathan Frederick Gardner , Melvin Barker McLaurin , Michael Jason Grundmann , Werner Goetz , John Edward Epler , Qi Ye
- Applicant: Nathan Frederick Gardner , Melvin Barker McLaurin , Michael Jason Grundmann , Werner Goetz , John Edward Epler , Qi Ye
- Applicant Address: NL Eindhoven
- Assignee: KONINKLIJKE PHILIPS N.V.
- Current Assignee: KONINKLIJKE PHILIPS N.V.
- Current Assignee Address: NL Eindhoven
- International Application: PCT/IB2011/054770 WO 20111026
- International Announcement: WO2012/059844 WO 20120510
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L33/00 ; C30B23/02 ; C30B25/18 ; C30B29/40 ; C30B33/06
Abstract:
In a method according to embodiments of the invention, a III-nitride layer is grown on a growth substrate. The III-nitride layer is connected to a host substrate. The growth substrate is removed. The growth substrate is a non-III-nitride material. The growth substrate has an in-plane lattice constant a substrate. The III-nitride layer has a bulk lattice constant a layer. In some embodiments, [(|a substrate−a layer|)/asubstrate]*100% is no more than 1%.
Public/Granted literature
- US20130244364A1 METHOD OF FORMING A COMPOSITE SUBSTRATE Public/Granted day:2013-09-19
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