Invention Grant
- Patent Title: Cassette transfer apparatus and cassette transferring method using the same
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Application No.: US14494669Application Date: 2014-09-24
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Publication No.: US09640417B2Publication Date: 2017-05-02
- Inventor: Nam-Su Yuk , Kyung-Won Kang , Tae-Hun Kim , Se-Ho Park , Juno Park , Yong-Won Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2013-0129069 20131029
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/687 ; H01L21/677
Abstract:
A cassette transfer apparatus includes a holding unit configured to hold a cassette having a wafer loaded therein, the cassette having at least one stepped part, and the holding unit including at least one holding part configured to have the at least one stepped part placed thereon. The at least one stepped part includes a pair of stepped parts provided at opposite surfaces of the cassette, and the at least one holding part includes a pair of holding parts that extends back and forth and is configured to have the pair of stepped parts placed thereon.
Public/Granted literature
- US20150117988A1 CASSETTE TRANSFER APPARATUS AND CASSETTE TRANSFERRING METHOD USING THE SAME Public/Granted day:2015-04-30
Information query
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