公开(公告)号：US09972519B2

公开(公告)日：2018-05-15

申请号：US14596405

申请日：2015-01-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Nam-Su Yuk ,  Jae-Won Jeong ,  Ho-Youl Lee ,  Ju-No Park ,  Jae-Young Eom

IPC: G05B19/418 ,  H01L21/68 ,  H01L21/67

CPC classification number: H01L21/681 ,  H01L21/67242 ,  H01L21/67259

Abstract: A substrate transporting apparatus includes a first light emitting sensor emitting a first sensing light in a first direction, a first light receiving sensor receiving the first sensing light, a second light emitting sensor emitting a second sensing light in a second direction different than the first direction, a second light receiving sensor receiving the second sensing light, a substrate transporting loader passing through traveling lines of the first sensing light and the second sensing light, a state information storage unit storing state information of the substrate transporting loader, and an operation information computing unit computing operation information of the substrate transporting loader based on the state information.

公开(公告)号：US09640417B2

公开(公告)日：2017-05-02

申请号：US14494669

申请日：2014-09-24

Applicant: Samsung Electronics Co., Ltd.

Inventor： Nam-Su Yuk ,  Kyung-Won Kang ,  Tae-Hun Kim ,  Se-Ho Park ,  Juno Park ,  Yong-Won Lee

IPC: H01L21/673 ,  H01L21/687 ,  H01L21/677

CPC classification number: H01L21/67379 ,  H01L21/6773 ,  H01L21/67775 ,  H01L21/67781 ,  H01L21/68707

Abstract: A cassette transfer apparatus includes a holding unit configured to hold a cassette having a wafer loaded therein, the cassette having at least one stepped part, and the holding unit including at least one holding part configured to have the at least one stepped part placed thereon. The at least one stepped part includes a pair of stepped parts provided at opposite surfaces of the cassette, and the at least one holding part includes a pair of holding parts that extends back and forth and is configured to have the pair of stepped parts placed thereon.

公开(公告)号：US20170173796A1

公开(公告)日：2017-06-22

申请号：US15278402

申请日：2016-09-28

Applicant: Samsung Electronics Co., Ltd.

Inventor： Kwang-Jun Kim ,  Doojin Kim ,  Kongwoo Lee ,  Joohyung Kim ,  Kyungbin Park ,  Nam-Su Yuk

IPC: B25J9/16 ,  B65G47/90 ,  G05D1/02

CPC classification number: B25J9/1697 ,  B25J9/1612 ,  B25J9/162 ,  B25J9/1679 ,  B65G47/905 ,  G05B2219/40053 ,  G05B2219/40538 ,  G05B2219/40613 ,  G05D1/0225 ,  G05D1/0234 ,  G05D1/0246 ,  G05D2201/0216 ,  Y10S901/01

Abstract: The present disclosure relates to a transfer robot and a method for controlling the same. The transfer robot includes a robot main body and a driving unit configured to move the robot main body toward a stage. The robot main body includes a distance sensor unit configured to obtain distance information between the robot main body and the stage, a first image acquisition unit configured to receive an image of a first mark of the stage and obtain a first image information, a manipulation unit configured to pick up a target object disposed on the stage, and a control unit configured to control the driving unit using the distance information and the first image information and thereby to causing the robot main body to be placed at a desired position spaced apart from the stage.