- 专利标题: Silicon carbide single crystal manufacturing apparatus
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申请号: US14126520申请日: 2012-07-24
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公开(公告)号: US09644286B2公开(公告)日: 2017-05-09
- 发明人: Kazukuni Hara
- 申请人: Kazukuni Hara
- 申请人地址: JP Kariya
- 专利权人: DENSO CORPORATION
- 当前专利权人: DENSO CORPORATION
- 当前专利权人地址: JP Kariya
- 代理机构: Posz Law Group, PLC
- 优先权: JP2011-165719 20110728
- 国际申请: PCT/JP2012/004699 WO 20120724
- 国际公布: WO2013/014920 WO 20130131
- 主分类号: C30B25/08
- IPC分类号: C30B25/08 ; C30B25/10 ; C30B25/14 ; C30B29/36 ; C30B25/12
摘要:
A silicon carbide single crystal manufacturing apparatus includes a vacuum chamber, a pedestal on which a seed crystal is disposed, an inlet of source gas, a reaction chamber extending from a bottom surface of the vacuum chamber toward the pedestal, a first heating device disposed around an outer periphery of the reaction chamber, a second heating device disposed around an outer periphery of the pedestal, and an outlet disposed outside the first and second heating devices in the vacuum chamber. After the source gas supplied from the reaction chamber is supplied toward the pedestal, the source gas is let flow outward in a radial direction of the silicon carbide single crystal between the reaction chamber and the silicon carbide single crystal and is discharged through the outlet.
公开/授权文献
- US20140123901A1 SILICON CARBIDE SINGLE CRYSTAL MANUFACTURING APPARATUS 公开/授权日:2014-05-08
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