Invention Grant
- Patent Title: Semiconductor devices with graphene nanoribbons
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Application No.: US15060806Application Date: 2016-03-04
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Publication No.: US09647124B2Publication Date: 2017-05-09
- Inventor: Emre Alptekin , Viraj Y. Sardesai , Reinaldo A. Vega
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Mlotkowski Safran Cole & Calderon P.C
- Agent Michael LeStrange; Andrew M. Calderon
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/088 ; H01L21/8234 ; H01L21/02 ; B82Y10/00 ; H01L29/775 ; H01L29/06 ; H01L29/16 ; H01L29/778 ; H01L29/78
Abstract:
Semiconductor devices with graphene nanoribbons and methods of manufacture are disclosed. The method includes forming at least one layer of Si material on a substrate. The method further includes forming at least one layer of carbon based material adjacent to the at least one layer of Si. The method further includes patterning at least one of the at least one layer of Si material and the at least one layer of carbon based material. The method further includes forming graphene on the patterned carbon based material.
Public/Granted literature
- US20160190344A1 SEMICONDUCTOR DEVICES WITH GRAPHENE NANORIBBONS Public/Granted day:2016-06-30
Information query
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