Invention Grant
- Patent Title: Sputtering device and sputtering method
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Application No.: US14297105Application Date: 2014-06-05
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Publication No.: US09650710B2Publication Date: 2017-05-16
- Inventor: Seung-Ho Choi , Yong-Suk Lee
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR
- Agency: Innovation Counsel LLP
- Priority: KR10-2014-0003607 20140110
- Main IPC: C23C14/35
- IPC: C23C14/35 ; H01J37/34 ; C23C14/54 ; H01L51/00 ; C23C14/00 ; H01J37/32

Abstract:
One or more embodiments of the present invention relate to a sputtering device and a sputtering method. By using the sputtering device according to the present embodiment, characteristics of a deposition layer formed at the organic light emitting display apparatus may be improved, thereby improving electric characteristics and image quality of the organic light emitting display apparatus may be improved.
Public/Granted literature
- US20150200383A1 SPUTTERING DEVICE AND SPUTTERING METHOD Public/Granted day:2015-07-16
Information query
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