Device and method for depositing organic material
    2.
    发明授权
    Device and method for depositing organic material 有权
    用于沉积有机材料的装置和方法

    公开(公告)号:US09515263B2

    公开(公告)日:2016-12-06

    申请号:US14456930

    申请日:2014-08-11

    Abstract: A device for depositing an organic material includes a substrate; a mask having an opening portion and a shield portion; a fixing member for fixing the substrate and the mask to each other; a deposition source comprising a plurality of nozzles arranged in a first direction and configured to spray the organic material; and a plurality of shield plates near the plurality of nozzles on the deposition source. An angle θ between the substrate and a line extended from a distal end of one of the nozzles to a center of a distal end of a corresponding one of the shield plates is greater than or equal to a taper angle Φ of the shield portion of the mask.

    Abstract translation: 用于沉积有机材料的装置包括:基板; 具有开口部分和屏蔽部分的掩模; 用于将所述基板和所述掩模彼此固定的固定构件; 沉积源,包括沿第一方向布置并被配置为喷射有机材料的多个喷嘴; 以及在沉积源上的多个喷嘴附近的多个屏蔽板。 基板与从其中一个喷嘴的远端延伸到对应的一个屏蔽板的远端的中心的线之间的角度θ大于或等于屏蔽部分的屏蔽部分的锥角Φ 面具。

    Sputtering apparatus and method
    4.
    发明授权

    公开(公告)号:US09715997B2

    公开(公告)日:2017-07-25

    申请号:US14226564

    申请日:2014-03-26

    Abstract: A sputtering apparatus includes: a first cylindrical target unit, a second cylindrical target unit facing the first cylindrical target unit; a third cylindrical target unit facing the first cylindrical target unit and the second cylindrical target unit; a fourth cylindrical target unit facing the first cylindrical target unit, the second cylindrical target unit, and the third cylindrical target unit; and a power unit configured to provide power such that two of the first cylindrical target unit, the second cylindrical target unit, the third cylindrical target unit, and the fourth cylindrical target unit function as different electrodes.

    SPUTTERING DEVICE AND SPUTTERING METHOD
    9.
    发明申请
    SPUTTERING DEVICE AND SPUTTERING METHOD 有权
    溅射装置和溅射方法

    公开(公告)号:US20150200383A1

    公开(公告)日:2015-07-16

    申请号:US14297105

    申请日:2014-06-05

    Abstract: One or more embodiments of the present invention relate to a sputtering device and a sputtering method. By using the sputtering device according to the present embodiment, characteristics of a deposition layer formed at the organic light emitting display apparatus may be improved, thereby improving electric characteristics and image quality of the organic light emitting display apparatus may be improved.

    Abstract translation: 本发明的一个或多个实施例涉及溅射装置和溅射方法。 通过使用根据本实施例的溅射装置,可以提高在有机发光显示装置上形成的沉积层的特性,从而可以提高有机发光显示装置的电特性和图像质量。

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