Invention Grant
- Patent Title: Semiconductor device and method for fabricating the same
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Application No.: US14844004Application Date: 2015-09-03
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Publication No.: US09653402B2Publication Date: 2017-05-16
- Inventor: I-Ming Tseng , Wen-An Liang , Chen-Ming Huang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Priority: CN201510388897 20150706
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/94 ; H01L23/535 ; H01L29/66 ; H01L29/78 ; H01L29/06 ; H01L29/161 ; H01L29/16

Abstract:
A semiconductor device and a method of fabricating the same, the semiconductor device including a fin structure, a first liner, a first insulating layer and a dummy gate structure. The fin structure is disposed on a substrate, where the fin structure has a trench. The first liner disposed in the trench. The first insulating layer disposed on the first liner. The dummy gate structure is disposed on the first insulating layer and disposed above the trench, where a bottom surface of the dummy gate and a top surface of the fin structure are on a same level.
Public/Granted literature
- US20170012000A1 SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2017-01-12
Information query
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