Invention Grant
- Patent Title: Field effect transistors including fin structures with different doped regions and semiconductor devices including the same
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Application No.: US14980134Application Date: 2015-12-28
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Publication No.: US09653551B2Publication Date: 2017-05-16
- Inventor: Changwoo Oh , Myung Gil Kang , Bomsoo Kim , Jongshik Yoon
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Ward and Smith, P.A.
- Priority: KR10-2012-0028996 20120321
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/10 ; H01L21/84 ; H01L21/8238 ; H01L29/66 ; H01L29/78 ; H01L27/092 ; H01L27/088 ; H01L29/06 ; H01L29/423

Abstract:
Field effect transistors are provided. According to the field effect transistor, a source region and a drain region are provided on a substrate and a fin portion is provided to protrude from the substrate. The fin portion connects the source region and the drain region to each other. A gate electrode pattern is disposed on the fin portion and extends to cross over the fin portion. A gate dielectric layer is disposed between the fin portion and the gate electrode pattern. A semiconductor layer is disposed between the fin portion and the gate dielectric layer. The semiconductor layer and the fin portion have dopant-concentrations different from each other, respectively.
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