Invention Grant
- Patent Title: Methods of manufacturing a semiconductor device
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Application No.: US14956382Application Date: 2015-12-01
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Publication No.: US09653623B2Publication Date: 2017-05-16
- Inventor: Yi-Koan Hong , Yeun-Sang Park , Byung-Lyul Park , Joo-Hee Jang
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR
- Agency: Renaissance IP Law Group LLP
- Priority: KR10-2014-0170417 20141202
- Main IPC: H01L31/02
- IPC: H01L31/02 ; H01L31/0232 ; H01L23/00

Abstract:
In a method for fabricating a semiconductor, a first conductive pattern structure partially protruding upwardly from first insulating interlayer is formed in first insulating interlayer. A first bonding insulation layer pattern covering the protruding portion of first conductive pattern structure is formed on first insulating interlayer. A first adhesive pattern containing a polymer is formed on first bonding insulation layer pattern to fill a first recess formed on first bonding insulation layer pattern. A second bonding insulation layer pattern covering the protruding portion of second conductive pattern structure is formed on second insulating interlayer. A second adhesive pattern containing a polymer is formed on second bonding insulation layer pattern to fill a second recess formed on second bonding insulation layer pattern. The first and second adhesive patterns are melted. The first and second substrates are bonded with each other so that the conductive pattern structures contact each other.
Public/Granted literature
- US20160155862A1 METHODS OF MANUFACTURING A SEMICONDUCTOR DEVICE Public/Granted day:2016-06-02
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