发明授权
- 专利标题: Probe apparatus
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申请号: US13634409申请日: 2011-03-11
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公开(公告)号: US09658285B2公开(公告)日: 2017-05-23
- 发明人: Isao Kouno , Ken Taoka , Eiichi Shinohara , Ikuo Ogasawara
- 申请人: Isao Kouno , Ken Taoka , Eiichi Shinohara , Ikuo Ogasawara
- 申请人地址: JP Tokyo
- 专利权人: TOKYO ELECTRON LIMITED
- 当前专利权人: TOKYO ELECTRON LIMITED
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2010-055768 20100312; JP2010-180348 20100811
- 国际申请: PCT/JP2011/055819 WO 20110311
- 国际公布: WO2011/111834 WO 20110915
- 主分类号: G01R31/28
- IPC分类号: G01R31/28 ; G01R1/04 ; G01R31/26
摘要:
A probe apparatus includes a movable mounting table for holding a test object provided with a plurality of power devices including diodes; a probe card arranged above the mounting table with probes; a measuring unit for measuring electrical characteristics of the power devices by bringing the probes into electrical contact with the test object in a state that a conductive film electrode formed on at least a mounting surface of the mounting table is electrically connected to a conductive layer formed on a rear surface of the test object; and a conduction member for electrically interconnecting the conductive film electrode and the measuring unit when measuring the electrical characteristics. The conduction member is interposed between an outer peripheral portion of the probe card and an outer peripheral portion of the mounting table.
公开/授权文献
- US20130063171A1 PROBE APPARATUS 公开/授权日:2013-03-14