Invention Grant
- Patent Title: Monolithic three-axis magnetic field sensor
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Application No.: US14434858Application Date: 2013-10-10
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Publication No.: US09658298B2Publication Date: 2017-05-23
- Inventor: Yongyao Cai , Leyue Jiang , Paul Zavracky , Yang Zhao , Shuo Gu
- Applicant: MEMSIC, INC.
- Applicant Address: US MA Andover
- Assignee: MEMSIC, INC
- Current Assignee: MEMSIC, INC
- Current Assignee Address: US MA Andover
- Agency: Preti Flaherty Beliveau & Pachios LLP
- International Application: PCT/US2013/064286 WO 20131010
- International Announcement: WO2014/059110 WO 20140417
- Main IPC: G01R33/02
- IPC: G01R33/02 ; G01R33/09 ; G01R33/00

Abstract:
A three-axis magnetic sensor or magnetometer is provided. Two magnetic sensor Wheatstone bridges using barber pole AMR structures are fabricated on opposite sides of a bump structure formed on a substrate to provide surfaces that are at a predetermined angle with respect to the flat surface of the substrate. The bridge assembly is oriented along the Y axis and the bridges are interconnected such that Y and Z channel signals can be produced by processing of the bridge signals. The X channel signals are provided by an X axis sensor provided on the level surface of the substrate.
Public/Granted literature
- US20150285873A1 MONOLITHIC THREE-AXIS MAGNETIC FIELD SENSOR Public/Granted day:2015-10-08
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