公开(公告)号：US09658298B2

公开(公告)日：2017-05-23

申请号：US14434858

申请日：2013-10-10

Applicant: MEMSIC, INC.

Inventor： Yongyao Cai ,  Leyue Jiang ,  Paul Zavracky ,  Yang Zhao ,  Shuo Gu

IPC: G01R33/02 ,  G01R33/09 ,  G01R33/00

CPC classification number: G01R33/0206 ,  G01R33/00 ,  G01R33/0005 ,  G01R33/096

Abstract: A three-axis magnetic sensor or magnetometer is provided. Two magnetic sensor Wheatstone bridges using barber pole AMR structures are fabricated on opposite sides of a bump structure formed on a substrate to provide surfaces that are at a predetermined angle with respect to the flat surface of the substrate. The bridge assembly is oriented along the Y axis and the bridges are interconnected such that Y and Z channel signals can be produced by processing of the bridge signals. The X channel signals are provided by an X axis sensor provided on the level surface of the substrate.

公开(公告)号：US20150285873A1

公开(公告)日：2015-10-08

申请号：US14434858

申请日：2013-10-10

Applicant: MEMSIC, INC.

Inventor： Yongyao Cai ,  Leyue Jiang ,  Paul Zavracky ,  Yang Zhao ,  Shuo Gu

IPC: G01R33/02 ,  G01R33/09 ,  G01R33/00

CPC classification number: G01R33/0206 ,  G01R33/00 ,  G01R33/0005 ,  G01R33/096

Abstract: A three-axis magnetic sensor or magnetometer is provided. Two magnetic sensor Wheatstone bridges using barber pole AMR structures are fabricated on opposite sides of a bump structure formed on a substrate to provide surfaces that are at a pre-determined angle with respect to the flat surface of the substrate. The bridge assembly is oriented along the Y axis and the bridges are interconnected such that Y and Z channel signals can be produced by processing of the bridge signals. The X channel signals are provided by an X axis sensor provided on the level surface of the substrate.

Abstract translation: 提供三轴磁传感器或磁力计。 使用理发杆AMR结构的两个磁传感器惠斯登电桥在形成在基板上的凸块结构的相对侧上制造，以提供相对于基板的平坦表面处于预定角度的表面。 桥接组件沿着Y轴定向，并且桥被互连，使得可以通过处理桥信号来产生Y和Z通道信号。 X通道信号由设置在基板的水平表面上的X轴传感器提供。