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公开(公告)号：US09658298B2
公开(公告)日：2017-05-23
申请号：US14434858
申请日：2013-10-10
Applicant: MEMSIC, INC.
Inventor： Yongyao Cai , Leyue Jiang , Paul Zavracky , Yang Zhao , Shuo Gu
CPC classification number: G01R33/0206 , G01R33/00 , G01R33/0005 , G01R33/096
Abstract: A three-axis magnetic sensor or magnetometer is provided. Two magnetic sensor Wheatstone bridges using barber pole AMR structures are fabricated on opposite sides of a bump structure formed on a substrate to provide surfaces that are at a predetermined angle with respect to the flat surface of the substrate. The bridge assembly is oriented along the Y axis and the bridges are interconnected such that Y and Z channel signals can be produced by processing of the bridge signals. The X channel signals are provided by an X axis sensor provided on the level surface of the substrate.
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公开(公告)号：US10139256B2
公开(公告)日：2018-11-27
申请号：US14816628
申请日：2015-08-03
Applicant: MEMSIC, INC.
Inventor： Yang Zhao , Ohlan Silpachai , Francis Man , Zhengxin Zhao
Abstract: A MEMS flow sensor is provided having a micro flow channel etched in a silicon structure composed of two silicon substrates bonded or fused together. A heater and one or more temperature sensors are, in one embodiment, disposed around the perimeter of the flow channel and outside of the channel. In another embodiment, a heater and one or more temperature sensors are respectively disposed outside the flow channel at the top and bottom of the channel. In further embodiments, a heater and one or more temperature sensors are located inside the flow channel on one or more surfaces thereof or around the inside perimeter of the channel. The flow sensors in accordance with the invention are preferably fabricated using wafer scale fabrication techniques.
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公开(公告)号：US09874467B2
公开(公告)日：2018-01-23
申请号：US15047839
申请日：2016-02-19
Applicant: MEMSIC, INC.
Inventor： Thomas O. Maginnis , Nan Jou Pern , Zhengxin Zhao , Yongyao Cai , Yang Zhao
CPC classification number: G01F1/6845 , G01F1/36 , G01F1/688 , G01F15/046 , G01F25/0053 , G01N11/08
Abstract: The present invention provides a MEMS thermal flow sensor or meter for measuring the flow rate of a fluid without need for calibration of the flow sensor for that particular fluid. A response curve is determined by plotting the sensor output voltage against the volume flow rate divided by fluid thermal diffusivity for a calibration fluid of known thermal diffusivity, and storing response curve data in memory. A conversion factor is employed to provide a measure of correct flow rate of an unknown fluid. This conversion factor is derived from the ratio of the thermal time constant of the calibration fluid to the thermal time constant of the measured fluid, the time constants being measured at zero flow. These time constants are stored in memory. This conversion factor in conjunction with the response curve data is utilized by the processor to produce the correct flow rate. The invention also encompasses a method for measuring fluid flow rate of fluids of differing properties without necessity of a separate flow calibration for each fluid.
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公开(公告)号：US20160245681A1
公开(公告)日：2016-08-25
申请号：US15047839
申请日：2016-02-19
Applicant: MEMSIC, INC.
Inventor： Thomas O. Maginnis , Nan Jou Pern , Zhengxin Zhao , Yongyao Cai , Yang Zhao
IPC: G01F1/684
CPC classification number: G01F1/6845 , G01F1/36 , G01F1/688 , G01F15/046 , G01F25/0053 , G01N11/08
Abstract: The present invention provides a MEMS thermal flow sensor or meter for measuring the flow rate of a fluid without need for calibration of the flow sensor for that particular fluid. A response curve is determined by plotting the sensor output voltage against the volume flow rate divided by fluid thermal diffusivity for a calibration fluid of known thermal diffusivity, and storing response curve data in memory. A conversion factor is employed to provide a measure of correct flow rate of an unknown fluid. This conversion factor is derived from the ratio of the thermal time constant of the calibration fluid to the thermal time constant of the measured fluid, the time constants being measured at zero flow. These time constants are stored in memory. This conversion factor in conjunction with the response curve data is utilized by the processor to produce the correct flow rate. The invention also encompasses a method for measuring fluid flow rate of fluids of differing properties without necessity of a separate flow calibration for each fluid.
Abstract translation: 本发明提供一种用于测量流体流速的MEMS热流量传感器或仪表，而不需要校准该特定流体的流量传感器。 通过将传感器输出电压与已知热扩散系数的校准流体的体积流量除以流体热扩散率相加，并将响应曲线数据存储在存储器中来确定响应曲线。 使用转换因子来提供未知流体的正确流量的量度。 该转换因子来自校准流体的热时间常数与测量流体的热时间常数的比率，时间常数是在零流量下测量的。 这些时间常数存储在内存中。 该转换系数与响应曲线数据一起被处理器利用以产生正确的流速。 本发明还包括用于测量不同性质的流体的流体流速的方法，而不需要对每种流体进行单独的流量校准。
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公开(公告)号：US20140130595A1
公开(公告)日：2014-05-15
申请号：US13674506
申请日：2012-11-12
Applicant: MEMSIC, INC.
Inventor： Yang Zhao , Paul M. Zavracky , Yongyao Cai
IPC: G01D5/54
CPC classification number: G01D5/54 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81B2201/0292 , B81B2207/015 , G01C19/5783 , G01P2015/0862
Abstract: A unitary sensor package having a magnetometer, accelerometer and gyroscope incorporated into a monolithic structure composed of one or more wafers or substrates. Pressure and/or other types of sensors can also be incorporated in the monolithic structure.
Abstract translation: 一体式传感器封装，其具有结合到由一个或多个晶片或衬底组成的整体结构中的磁力计，加速度计和陀螺仪。 压力和/或其他类型的传感器也可以并入整体结构中。
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Patent Agency Ranking
6.发明授权公开(公告)号：US09915550B2
公开(公告)日：2018-03-13
申请号：US14418761
申请日：2013-08-01
Applicant: Memsic, Inc.
Inventor： Dong An , Yang Zhao , Haipeng Ding , Jong-Ki Lee
Abstract: Method and apparatus of integrating a three-axis magnetometer and a three-axis accelerometer to provide attitude and heading, calibrated magnetometer and accelerometer data, and angular rate, while removing sensor error sources over time and temperature and to compensate for hard and soft iron distortions of the Earth magnetic field. Filtered accelerometer data are corrected to account for various error sources. The magnetic heading is calculated from a horizontal magnetic field vector transformed from three dimensional Earth's magnetic field vector by using quasi-static roll and pitch angles from the filtered accelerometer data. A first Kalman filter estimates the state vector, based on the principle that the magnitude of local Earth's magnetic field vector is constant, to form hard and soft iron correction matrices. A second Kalman filter estimates a correction matrix of coupled remaining soft iron and the misalignment of the magnetometer and the accelerometer, as the dot product of local Earth's magnetic field vector and a corrected gravitational acceleration vector, at a quasi-static position, is constant. The three dimensional Earth's magnetic field vector is received by removing the hard and soft irons through the soft iron and hard iron correction matrixes.
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公开(公告)号：US20170038235A1
公开(公告)日：2017-02-09
申请号：US14816628
申请日：2015-08-03
Applicant: MEMSIC, INC.
Inventor： Yang Zhao , Ohlan Silpachai , Francis Man , Zhengxin Zhao
CPC classification number: G01F1/6847 , G01F1/6845 , G01F1/692
Abstract: A MEMS flow sensor is provided having a micro flow channel etched in a silicon structure composed of two silicon substrates bonded or fused together. A heater and one or more temperature sensors are, in one embodiment, disposed around the perimeter of the flow channel and outside of the channel. In another embodiment, a heater and one or more temperature sensors are respectively disposed outside the flow channel at the top and bottom of the channel. In further embodiments, a heater and one or more temperature sensors are located inside the flow channel on one or more surfaces thereof or around the inside perimeter of the channel. The flow sensors in accordance with the invention are preferably fabricated using wafer scale fabrication techniques.
Abstract translation: 提供了一种MEMS流量传感器，其具有蚀刻在由两个结合或熔合在一起的硅衬底组成的硅结构中的微流动通道。 在一个实施例中，加热器和一个或多个温度传感器围绕流动通道的周边设置并且在通道的外部。 在另一个实施例中，加热器和一个或多个温度传感器分别设置在通道顶部和底部的流动通道的外部。 在另外的实施例中，加热器和一个或多个温度传感器位于通道的一个或多个表面上或围绕通道的内周边。 根据本发明的流量传感器优选地使用晶片级制造技术来制造。
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公开(公告)号：US20160062488A1
公开(公告)日：2016-03-03
申请号：US14631058
申请日：2015-02-25
Applicant: MEMSIC, INC.
Inventor： Yang Zhao , Michael Sun
IPC: G06F3/0354 , G09G5/18 , G06F3/01
CPC classification number: G06F3/0386 , G06F3/03542 , G06F3/043
Abstract: An air mouse system is described. The air mouse is configured to periodically transmit RF signals in order to trigger a plurality of ultrasonic transmitters arranged on a television. The ultrasonic transmitters transmit ultrasonic signals when being triggered by the RF signals from the RF trigger. An ultrasonic receiver receives the ultrasonic signals. A processor calculates a location of the air mouse with respect to the ultrasonic transmitters based on time differences of the ultrasonic signals transmitted by the ultrasonic transmitters arriving at the ultrasonic receiver. A series of locations of the air mouse forms a motion trail of the air mouse and the air mouse transmits the motion trail to the television wirelessly. The motion trail is projected as a cursor trail on the television screen by the television, to control the cursor on the television screen by virtue of the motion of the air mouse.
Abstract translation: 描述了空中鼠标系统。 空中鼠标被配置为周期性地发送RF信号以便触发布置在电视机上的多个超声波发射器。 当由RF触发器的RF信号触发时，超声波发射器发射超声波信号。 超声波接收器接收超声波信号。 处理器基于到达超声波接收器的超声波发射机发送的超声波信号的时间差，计算空中鼠标相对于超声波发射器的位置。 空中鼠标的一系列位置形成空中鼠标的运动轨迹，空中鼠标将运动轨迹无线地传送到电视机。 运动轨迹由电视机在电视屏幕上投影为光标轨迹，借助于空中鼠标的运动来控制电视屏幕上的光标。
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公开(公告)号：US20150285873A1
公开(公告)日：2015-10-08
申请号：US14434858
申请日：2013-10-10
Applicant: MEMSIC, INC.
Inventor： Yongyao Cai , Leyue Jiang , Paul Zavracky , Yang Zhao , Shuo Gu
CPC classification number: G01R33/0206 , G01R33/00 , G01R33/0005 , G01R33/096
Abstract: A three-axis magnetic sensor or magnetometer is provided. Two magnetic sensor Wheatstone bridges using barber pole AMR structures are fabricated on opposite sides of a bump structure formed on a substrate to provide surfaces that are at a pre-determined angle with respect to the flat surface of the substrate. The bridge assembly is oriented along the Y axis and the bridges are interconnected such that Y and Z channel signals can be produced by processing of the bridge signals. The X channel signals are provided by an X axis sensor provided on the level surface of the substrate.
Abstract translation: 提供三轴磁传感器或磁力计。 使用理发杆AMR结构的两个磁传感器惠斯登电桥在形成在基板上的凸块结构的相对侧上制造，以提供相对于基板的平坦表面处于预定角度的表面。 桥接组件沿着Y轴定向，并且桥被互连，使得可以通过处理桥信号来产生Y和Z通道信号。 X通道信号由设置在基板的水平表面上的X轴传感器提供。
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10.发明申请METHOD AND APPARATUS FOR DATA FUSION OF A THREE-AXIS MAGNETOMETER AND THREE AXIS ACCELEROMETER 有权三轴磁力计和三轴加速度计的数据融合方法与装置公开(公告)号：US20150177020A1
公开(公告)日：2015-06-25
申请号：US14418761
申请日：2013-08-01
Applicant: Memsic, Inc.
Inventor： Dong An , Yang Zhao , Haipeng Ding , Jong-Ki Lee
Abstract: Method and apparatus of integrating a three-axis magnetometer and a three-axis accelerometer to provide attitude and heading, calibrated magnetometer and accelerometer data, and angular rate, while removing sensor error sources over time and temperature and to compensate for hard and soft iron distortions of the Earth magnetic field. Filtered accelerometer data are corrected to account for various error sources. The magnetic heading is calculated from a horizontal magnetic field vector transformed from three dimensional Earth's magnetic field vector by using quasi-static roll and pitch angles from the filtered accelerometer data. A first Kalman filter estimates the state vector, based on the principle that the magnitude of local Earth's magnetic field vector is constant, to form hard and soft iron correction matrices. A second Kalman filter estimates a correction matrix of coupled remaining soft iron and the misalignment of the magnetometer and the accelerometer, as the dot product of local Earth's magnetic field vector and a corrected gravitational acceleration vector, at a quasi-static position, is constant. The three dimensional Earth's magnetic field vector is received by removing the hard and soft irons through the soft iron and hard iron correction matrixes.
Abstract translation: 集成三轴磁力计和三轴加速度计的方法和装置，以提供姿态和航向，校准磁力计和加速度计数据以及角速率，同时消除传感器误差源随时间和温度，并补偿硬和软铁的失真 的地磁场。 过滤的加速度计数据被更正以解决各种错误源。 通过使用来自滤波的加速度计数据的准静态滚动和俯仰角从由三维地球磁场矢量变换的水平磁场矢量计算磁道。 第一卡尔曼滤波器基于局部地球的磁场矢量的大小恒定的原理来估计状态矢量，以形成硬和软铁校正矩阵。 第二卡尔曼滤波器估计耦合的剩余软铁的校正矩阵和磁力计和加速度计的未对准，因为在准静态位置处的局部地球磁场矢量和校正的重力加速度矢量的积积是恒定的。 通过软铁和硬铁校正矩阵去除硬和软铁来接收三维地球的磁场矢量。
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