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公开(公告)号：US09116198B2
公开(公告)日：2015-08-25
申请号：US13740927
申请日：2013-01-14
Applicant: MEMSIC, INC.
Inventor： Yongyao Cai , Jiaoming Qiu , Leyue Jiang
CPC classification number: G01R33/093 , G01R33/09 , G01R33/098
Abstract: A multi-axis GMR or TGMR based magnetic field sensor system is disclosed. Preferably a three axis sensor system is provided for sensing magnetic flux along three mutually orthogonal axes, which can be used for magnetic compass or other magnetic field sensing applications. The sensing units are operative to sense X and Y axis magnetic flux signals in the device (XY) plane, while Z axis sensitivity is achieved by use of a continuous ring shaped or octagonal magnetic concentrator that is adapted to convert the Z axis magnetic flux signal into magnetic flux signals in the XY plane.
Abstract translation: 公开了一种基于多轴GMR或TGMR的磁场传感器系统。 优选地，提供三轴传感器系统用于感测沿着三个相互正交的轴的磁通量，其可以用于磁罗盘或其他磁场感测应用。 感测单元用于检测装置（XY）平面中的X轴和Y轴磁通信号，而Z轴灵敏度通过使用适于将Z轴磁通量信号转换的连续环形或八边形磁集中器来实现 进入XY平面内的磁通信号。
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公开(公告)号：US09658298B2
公开(公告)日：2017-05-23
申请号：US14434858
申请日：2013-10-10
Applicant: MEMSIC, INC.
Inventor： Yongyao Cai , Leyue Jiang , Paul Zavracky , Yang Zhao , Shuo Gu
CPC classification number: G01R33/0206 , G01R33/00 , G01R33/0005 , G01R33/096
Abstract: A three-axis magnetic sensor or magnetometer is provided. Two magnetic sensor Wheatstone bridges using barber pole AMR structures are fabricated on opposite sides of a bump structure formed on a substrate to provide surfaces that are at a predetermined angle with respect to the flat surface of the substrate. The bridge assembly is oriented along the Y axis and the bridges are interconnected such that Y and Z channel signals can be produced by processing of the bridge signals. The X channel signals are provided by an X axis sensor provided on the level surface of the substrate.
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公开(公告)号：US20130265039A1
公开(公告)日：2013-10-10
申请号：US13740927
申请日：2013-01-14
Applicant: MEMSIC, INC.
Inventor： Yongyao Cai , Jiaoming Qiu , Leyue Jiang
IPC: G01R33/09
CPC classification number: G01R33/093 , G01R33/09 , G01R33/098
Abstract: A multi-axis GMR or TGMR based magnetic field sensor system is disclosed. Preferably a three axis sensor system is provided for sensing magnetic flux along three mutually orthogonal axes, which can be used for magnetic compass or other magnetic field sensing applications. The sensing units are operative to sense X and Y axis magnetic flux signals in the device (XY) plane, while Z axis sensitivity is achieved by use of a continuous ring shaped or octagonal magnetic concentrator that is adapted to convert the Z axis magnetic flux signal into magnetic flux signals in the XY plane.
Abstract translation: 公开了一种基于多轴GMR或TGMR的磁场传感器系统。 优选地，提供三轴传感器系统用于感测沿着三个相互正交的轴的磁通量，其可以用于磁罗盘或其他磁场感测应用。 感测单元用于检测装置（XY）平面中的X轴和Y轴磁通信号，而Z轴灵敏度通过使用适于将Z轴磁通量信号转换的连续环形或八边形磁集中器来实现 进入XY平面内的磁通信号。
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公开(公告)号：US20150285873A1
公开(公告)日：2015-10-08
申请号：US14434858
申请日：2013-10-10
Applicant: MEMSIC, INC.
Inventor： Yongyao Cai , Leyue Jiang , Paul Zavracky , Yang Zhao , Shuo Gu
CPC classification number: G01R33/0206 , G01R33/00 , G01R33/0005 , G01R33/096
Abstract: A three-axis magnetic sensor or magnetometer is provided. Two magnetic sensor Wheatstone bridges using barber pole AMR structures are fabricated on opposite sides of a bump structure formed on a substrate to provide surfaces that are at a pre-determined angle with respect to the flat surface of the substrate. The bridge assembly is oriented along the Y axis and the bridges are interconnected such that Y and Z channel signals can be produced by processing of the bridge signals. The X channel signals are provided by an X axis sensor provided on the level surface of the substrate.
Abstract translation: 提供三轴磁传感器或磁力计。 使用理发杆AMR结构的两个磁传感器惠斯登电桥在形成在基板上的凸块结构的相对侧上制造，以提供相对于基板的平坦表面处于预定角度的表面。 桥接组件沿着Y轴定向，并且桥被互连，使得可以通过处理桥信号来产生Y和Z通道信号。 X通道信号由设置在基板的水平表面上的X轴传感器提供。
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