- 专利标题: Polishing composition
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申请号: US14000319申请日: 2012-02-20
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公开(公告)号: US09662763B2公开(公告)日: 2017-05-30
- 发明人: Hiroshi Asano , Kazusei Tamai , Yasunori Okada
- 申请人: Hiroshi Asano , Kazusei Tamai , Yasunori Okada
- 申请人地址: JP Kiyosu-Shi
- 专利权人: FUJIMI INCORPORATED
- 当前专利权人: FUJIMI INCORPORATED
- 当前专利权人地址: JP Kiyosu-Shi
- 代理机构: Foley & Lardner LLP
- 优先权: JP2011-034801 20110221
- 国际申请: PCT/JP2012/053920 WO 20120220
- 国际公布: WO2012/115020 WO 20120830
- 主分类号: B24B37/04
- IPC分类号: B24B37/04 ; C09K3/14 ; H01L21/02 ; C09G1/02
摘要:
Provided is a polishing composition containing at least aluminum oxide abrasive grains and water, and having a pH of 8.5 or higher. The aluminum oxide abrasive grains have a specific surface area of 20 m2/g or less. It is preferable for the aluminum oxide abrasive grains to have an average secondary particle size of 0.1 μm or more and 20 μm or less. The polishing composition is used for polishing hard and brittle materials having a Vickers hardness of 1,500 Hv or higher, such as sapphire, silicon carbide, and gallium nitride.
公开/授权文献
- US20130324015A1 POLISHING COMPOSITION 公开/授权日:2013-12-05
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