Invention Grant
- Patent Title: Cold cathode ionization vacuum gauge
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Application No.: US14500820Application Date: 2014-09-29
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Publication No.: US09671302B2Publication Date: 2017-06-06
- Inventor: Gerardo A. Brucker , Timothy C. Swinney , Brandon J. Kelly
- Applicant: MKS Instruments, Inc.
- Applicant Address: US MA Andover
- Assignee: MKS Instruments, Inc.
- Current Assignee: MKS Instruments, Inc.
- Current Assignee Address: US MA Andover
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- Main IPC: G01L21/34
- IPC: G01L21/34 ; H01J9/50 ; G01L19/06 ; H01J41/06

Abstract:
A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.
Public/Granted literature
- US20150091579A1 COLD CATHODE IONIZATION VACUUM GAUGE Public/Granted day:2015-04-02
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