Invention Grant
- Patent Title: Laser with integrated multi line or scanning beam capability
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Application No.: US13845587Application Date: 2013-03-18
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Publication No.: US09678350B2Publication Date: 2017-06-13
- Inventor: Christian Wolters , Jijen Vazhaeparambil , Dirk Woll , Anatoly Romanovsky , Bret Whiteside , Stephen Biellak , Guoheng Zhao
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10 ; G02B26/12 ; G02B27/10 ; G02F1/01 ; G03F7/20 ; G02F1/35 ; H01S3/00
Abstract:
A method and system for providing illumination is disclosed. The method may include providing a laser having a predetermined wavelength; performing at least one of: beam splitting or beam scanning prior to a frequency conversion; converting a frequency of each output beam of the at least one of: beam splitting or beam scanning; and providing the frequency converted output beam for illumination.
Public/Granted literature
- US20130250385A1 Laser with Integrated Multi Line or Scanning Beam Capability Public/Granted day:2013-09-26
Information query
