- 专利标题: Molding wafer chamber
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申请号: US13208197申请日: 2011-08-11
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公开(公告)号: US09679783B2公开(公告)日: 2017-06-13
- 发明人: Jing-Cheng Lin , Chin-Chuan Chang , Jui-Pin Hung , Szu Wei Lu , Shin-Puu Jeng , Chen-Hua Yu
- 申请人: Jing-Cheng Lin , Chin-Chuan Chang , Jui-Pin Hung , Szu Wei Lu , Shin-Puu Jeng , Chen-Hua Yu
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Slater Matsil, LLP
- 主分类号: B29C33/12
- IPC分类号: B29C33/12 ; H01L21/56 ; H01L23/00 ; H01L23/31
摘要:
A bottom chase and a top chase of a molding system form a cavity to house a molding carrier and one or more devices. The molding carrier is placed in a desired location defined by a guiding component. The guiding component may be entirely within the cavity, or extend above a surface of the bottom chase and extend over a contacting edge of the top chase and the bottom chase, so that there is a gap between the edge of the top chase and the edge of the molding carrier which are filled by molding materials to cover the edge of the molding carrier. Releasing components may be associated with the top chase and/or the bottom chase, which may be a plurality of tape roller with a releasing film, or a plurality of vacuum holes within the bottom chase, or a plurality of bottom pins with the bottom chase.
公开/授权文献
- US20130037990A1 Molding Wafer Chamber 公开/授权日:2013-02-14
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