Invention Grant
- Patent Title: Apparatus for conserving electronic device manufacturing resources including ozone
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Application No.: US14610301Application Date: 2015-01-30
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Publication No.: US09685352B2Publication Date: 2017-06-20
- Inventor: Daniel O. Clark , Phil Chandler , Jay J. Jung
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, P.C.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; C23C14/56 ; B01D53/74 ; C23C16/44 ; B01D53/38
Abstract:
An electronic device manufacturing system is provided that may reduce the amount of resources used in electronic device manufacturing processes. In some embodiments, unreacted ozone exiting a process tool operating in an ozone mode may be diverted and used as an oxidant in an abatement tool when the process tool is operating in a non-ozone mode. Numerous other embodiments are provided.
Public/Granted literature
- US20150136239A1 METHODS AND APPARATUS FOR CONSERVING ELECTRONIC DEVICE MANUFACTURING RESOURCES Public/Granted day:2015-05-21
Information query
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