Invention Grant
- Patent Title: Monolithic three-dimensional (3D) ICs with local inter-level interconnects
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Application No.: US14778512Application Date: 2013-06-25
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Publication No.: US09685436B2Publication Date: 2017-06-20
- Inventor: Patrick Morrow , Kimin Jun , M. Clair Webb , Donald W. Nelson
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Green, Howard & Mughal LLP
- International Application: PCT/US2013/047542 WO 20130625
- International Announcement: WO2014/209278 WO 20141231
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/84 ; H01L27/06 ; H01L27/11 ; H01L21/8234 ; H01L27/12 ; H01L21/768 ; H01L21/822 ; H01L23/538 ; H01L29/78

Abstract:
Monolithic 3D ICs employing one or more local inter-level interconnect integrated intimately with at least one structure of at least one transistor on at least one transistor level within the 3D IC. In certain embodiments the local inter-level interconnect intersects a gate electrode or a source/drain region of at least one transistor and extends through at least one inter-level dielectric layer disposed between a first and second transistor level in the 3D IC. Local inter-level interconnects may advantageously make a direct vertical connection between transistors in different levels of the 3D IC without being routed laterally around the footprint (i.e., lateral, or planar, area) of either the overlying or underlying transistor level that is interconnected.
Public/Granted literature
- US20160197069A1 MONOLITHIC THREE-DIMENSIONAL (3D) ICs WITH LOCAL INTER-LEVEL INTERCONNECTS Public/Granted day:2016-07-07
Information query
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