Invention Grant
- Patent Title: Gate-all-around field effect transistors with horizontal nanosheet conductive channel structures for MOL/inter-channel spacing and related cell architectures
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Application No.: US15149722Application Date: 2016-05-09
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Publication No.: US09685564B2Publication Date: 2017-06-20
- Inventor: Rwik Sengupta , Mark Stephen Rodder , Joon Goo Hong , Titash Rakshit
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel, P.A.
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/06 ; H01L29/423 ; H01L29/786 ; H01L29/66

Abstract:
A Gate-All-Around (GAA) Field Effect Transistor (FET) can include a horizontal nanosheet conductive channel structure having a width in a horizontal direction in the GAA FET, a height that is perpendicular to the horizontal direction, and a length that extends in the horizontal direction, where the width of the horizontal nanosheet conductive channel structure defines a physical channel width of the GAA FET. First and second source/drain regions can be located at opposing ends of the horizontal nanosheet conductive channel structure and a unitary gate material completely surrounding the horizontal nanosheet conductive channel structure.
Public/Granted literature
Information query
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