Invention Grant
- Patent Title: Surface defect repair by irradiation
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Application No.: US14767263Application Date: 2014-02-17
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Publication No.: US09690191B2Publication Date: 2017-06-27
- Inventor: Sergey Oshemkov , Vladimir Kruglyakov
- Applicant: Carl Zeiss SMS Ltd.
- Applicant Address: IL Karmiel
- Assignee: Carl Zeiss SMS Ltd.
- Current Assignee: Carl Zeiss SMS Ltd.
- Current Assignee Address: IL Karmiel
- Agency: Fish & Richardson P.C.
- International Application: PCT/IL2014/050169 WO 20140217
- International Announcement: WO2014/125494 WO 20140821
- Main IPC: G03F1/72
- IPC: G03F1/72 ; G03F1/24 ; B82Y10/00 ; B82Y40/00
Abstract:
A method for repairing a defect on a substrate surface includes placing on the defect a nanoparticle that includes a conductive material. A region of the substrate surface in which the nanoparticle is placed is irradiated, the region being larger than the nanoparticle. An energy density of the irradiation is below a modification threshold for the substrate surface.
Public/Granted literature
- US20160004151A1 SURFACE DEFECT REPAIR BY IRRADIATION Public/Granted day:2016-01-07
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