公开(公告)号：US09690191B2

公开(公告)日：2017-06-27

申请号：US14767263

申请日：2014-02-17

Applicant: Carl Zeiss SMS Ltd.

Inventor： Sergey Oshemkov ,  Vladimir Kruglyakov

IPC: G03F1/72 ,  G03F1/24 ,  B82Y10/00 ,  B82Y40/00

CPC classification number: G03F1/72 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24

Abstract: A method for repairing a defect on a substrate surface includes placing on the defect a nanoparticle that includes a conductive material. A region of the substrate surface in which the nanoparticle is placed is irradiated, the region being larger than the nanoparticle. An energy density of the irradiation is below a modification threshold for the substrate surface.