Invention Grant
- Patent Title: Developing method, developing apparatus and storage medium
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Application No.: US14845827Application Date: 2015-09-04
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Publication No.: US09690202B2Publication Date: 2017-06-27
- Inventor: Yuichi Terashita , Hirofumi Takeguchi , Takeshi Shimoaoki , Kousuke Yoshihara , Tomohiro Iseki
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Minato-Ku
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Minato-Ku
- Agency: Burr & Brown, PLLC
- Priority: JP2014-180015 20140904; JP2015-114140 20150604
- Main IPC: G03D5/00
- IPC: G03D5/00 ; G03B27/42 ; G03F7/30 ; H01L21/67

Abstract:
A developing method includes: forming a puddle of a developer on a surface of the substrate held by the substrate holding unit by a first developer nozzle; subsequently spreading the puddle of the developer over the whole substrate surface, by moving the first developer nozzle discharging the developer from a central or peripheral part to the peripheral or central part of the rotating substrate, with a contacting part of the first developer nozzle contacting with the puddle; supplying the developer from a second developer nozzle onto the rotating substrate, thereby to uniformize, in the substrate plane, distribution of a degree of progress of development by the developer spreading step; and removing the developer between the developer spreading step and the developer supplying step to remove the developer on the substrate.
Public/Granted literature
- US20160070171A1 DEVELOPING METHOD, DEVELOPING APPARATUS AND STORAGE MEDIUM Public/Granted day:2016-03-10
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