Invention Grant
- Patent Title: Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components
-
Application No.: US14750840Application Date: 2015-06-25
-
Publication No.: US09696157B2Publication Date: 2017-07-04
- Inventor: Luca Giuseppe Falorni , Carlo Valzasina , Roberto Carminati , Alessandro Tocchio
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: ITTO2014A0522 20140630
- Main IPC: G01C19/00
- IPC: G01C19/00 ; G01C19/5712 ; B81B3/00 ; G01C19/5733 ; G01C19/5747

Abstract:
MEMS device having a support region elastically carrying a suspended mass through first elastic elements. A tuned dynamic absorber is elastically coupled to the suspended mass and configured to dampen quadrature forces acting on the suspended mass at the natural oscillation frequency of the dynamic absorber. The tuned dynamic absorber is formed by a damping mass coupled to the suspended mass through second elastic elements. In an embodiment, the suspended mass and the damping mass are formed in a same structural layer, for example of semiconductor material, and the damping mass is surrounded by the suspended mass.
Public/Granted literature
Information query