Invention Grant
- Patent Title: Ion implantation system and process
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Application No.: US14883538Application Date: 2015-10-14
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Publication No.: US09697988B2Publication Date: 2017-07-04
- Inventor: Zhimin Wan , Kourosh Saadatmand , Nicholas White
- Applicant: Advanced Ion Beam Technology, Inc.
- Applicant Address: TW Hsinchu
- Assignee: Advanced Ion Beam Technology, Inc.
- Current Assignee: Advanced Ion Beam Technology, Inc.
- Current Assignee Address: TW Hsinchu
- Agency: Morrison & Foerster LLP
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/30

Abstract:
Ion implantation systems and processes are disclosed. An exemplary ion implantation system may include an ion source, an extraction manipulator, a magnetic analyzer, and an electrode assembly. The extraction manipulator may be configured to generate an ion beam by extracting ions from the ion source. A cross-section of the generated ion beam may have a long dimension and a short dimension orthogonal to the long dimension of the ion beam. The magnetic analyzer may be configured to focus the ion beam in an x-direction parallel to the short dimension of the ion beam. The electrode assembly may be configured to accelerate or decelerate the ion beam. One or more entrance electrodes of the electrode assembly may define a first opening and the electrode assembly may be positioned relative to the magnetic analyzer such that the ion beam converges in the x-direction as the ion beam enters through the first opening.
Public/Granted literature
- US20170110287A1 ION IMPLANTATION SYSTEM AND PROCESS Public/Granted day:2017-04-20
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