- 专利标题: Methods of making source/drain regions positioned inside U-shaped semiconductor material using source/drain placeholder structures
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申请号: US14853073申请日: 2015-09-14
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公开(公告)号: US09711644B2公开(公告)日: 2017-07-18
- 发明人: Bartlomiej Jan Pawlak
- 申请人: GLOBALFOUNDRIES Inc.
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Amerson Law Firm, PLLC
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L29/772 ; H01L29/78 ; H01L29/08
摘要:
One illustrative method disclosed herein includes, among other things, forming a liner semiconductor material within a trench, the liner material defining a transistor cavity, and forming spaced-apart source/drain placeholder structures that are at least partially positioned within the transistor cavity, the spaced-apart source/drain placeholder structures defining a gate cavity therebetween where a portion of the liner semiconductor material is exposed within the gate cavity. The method further includes forming a gate structure within the gate cavity and, after forming the gate structure, removing at least a portion of the source/drain placeholder structures to define a plurality of source/drain cavities within the transistor cavity on opposite sides of the gate structure, and forming a source/drain structure in each of the source drain cavities.
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