- 专利标题: Semiconductor device and method of forming fine pitch RDL over semiconductor die in fan-out package
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申请号: US14139614申请日: 2013-12-23
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公开(公告)号: US09721922B2公开(公告)日: 2017-08-01
- 发明人: Pandi C. Marimuthu , Yaojian Lin , Won Kyoung Choi , Il Kwon Shim
- 申请人: STATS ChipPAC, Ltd.
- 申请人地址: SG Singapore
- 专利权人: STATS ChipPAC, Pte. Ltd.
- 当前专利权人: STATS ChipPAC, Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 代理机构: Patent Law Group: Atkins and Associates, P.C.
- 代理商 Robert D. Atkins
- 主分类号: H01L29/66
- IPC分类号: H01L29/66 ; H01L25/065 ; H01L23/538 ; H01L23/00 ; H01L23/31 ; H01L21/56
摘要:
A semiconductor device has a first conductive layer including a plurality of conductive traces. The first conductive layer is formed over a substrate. The conductive traces are formed with a narrow pitch. A first semiconductor die and second semiconductor die are disposed over the first conductive layer. A first encapsulant is deposited over the first and second semiconductor die. The substrate is removed. A second encapsulant is deposited over the first encapsulant. A build-up interconnect structure is formed over the first conductive layer and second encapsulant. The build-up interconnect structure includes a second conductive layer. A first passive device is disposed in the first encapsulant. A second passive device is disposed in the second encapsulant. A vertical interconnect unit is disposed in the second encapsulant. A third conductive layer is formed over second encapsulant and electrically connected to the build-up interconnect structure via the vertical interconnect unit.
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