Invention Grant
- Patent Title: Semiconductor devices and methods of manufacturing the same
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Application No.: US15026681Application Date: 2014-09-16
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Publication No.: US09722068B2Publication Date: 2017-08-01
- Inventor: Xianyu Wenxu , Yongsung Kim , Changyoul Moon , Yongyoung Park , Wooyoung Yang , Jeongyub Lee , Jooho Lee
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce P.L.C.
- Priority: KR10-2013-0117592 20131001
- International Application: PCT/KR2014/008591 WO 20140916
- International Announcement: WO2015/050328 WO 20150409
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/45 ; H01L29/66 ; H01L29/778 ; H01L29/06 ; H01L29/16 ; H01L21/306 ; H01L21/3105 ; H01L29/08 ; H01L29/10 ; H01L29/24 ; H01L29/423 ; H01L29/47

Abstract:
Provided are semiconductor devices and methods of manufacturing the same. A semiconductor device may include a source, a drain, a semiconductor element between the source and the drain, and a graphene layer that is provided on the source and the semiconductor element and is spaced apart from the drain. Surfaces of the source and the drain are substantially co-planar with a surface of the semiconductor element. The semiconductor element may be spaced apart from the source and may contact the drain. The graphene layer may have a planar structure. A gate insulating layer and a gate may be provided on the graphene layer. The semiconductor device may be a transistor. The semiconductor device may have a barristor structure. The semiconductor device may be a planar type graphene barristor.
Public/Granted literature
- US20160247906A1 SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2016-08-25
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