- 专利标题: Multiple gas injection system
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申请号: US15004143申请日: 2016-01-22
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公开(公告)号: US09728375B2公开(公告)日: 2017-08-08
- 发明人: Jorgen Rasmussen , Kevin C. Malinak
- 申请人: FEI Company
- 申请人地址: US OR Hillsboro
- 专利权人: FEI Company
- 当前专利权人: FEI Company
- 当前专利权人地址: US OR Hillsboro
- 代理机构: Scheinberg & Associates, P.C.
- 代理商 John B. Kelly
- 主分类号: H01J37/30
- IPC分类号: H01J37/30 ; H01J37/02 ; H01J37/16 ; F16K11/07 ; B05B1/00 ; B05B1/30
摘要:
A multi-positional valve is used to control the destination of gas flows from multiple gas sources. In one valve position the gases flow to an isolated vacuum system where the flow rate and mixture can be adjusted prior to introduction into a sample vacuum chamber. In another valve position the pre-mixed gases flow from the isolated vacuum chamber and through a needle into the sample vacuum chamber.
公开/授权文献
- US20160155607A1 MULTIPLE GAS INJECTION SYSTEM 公开/授权日:2016-06-02
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