- 专利标题: Copolymers for lithography and method for producing same, resist composition, method for producing substrate with pattern formed thereupon, method for evaluating copolymers, and method for analyzing copolymer compositions
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申请号: US13879737申请日: 2011-10-14
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公开(公告)号: US09733564B2公开(公告)日: 2017-08-15
- 发明人: Atsushi Yasuda , Tomoya Oshikiri , Hikaru Momose
- 申请人: Atsushi Yasuda , Tomoya Oshikiri , Hikaru Momose
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Chemical Corporation
- 当前专利权人: Mitsubishi Chemical Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2010-233754 20101018; JP2010-233884 20101018
- 国际申请: PCT/JP2011/073623 WO 20111014
- 国际公布: WO2012/053434 WO 20120426
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G03F7/20 ; C08F2/00 ; G01N24/08 ; C08F120/28 ; C08F220/28 ; G03F7/038 ; G03F7/039 ; C08F220/18 ; C08F220/20
摘要:
A target variable analysis unit (11) calculates the triad fractions of monomer units in the composition of a known polymer sample from the copolymerization reactivity ratios of the monomer units to obtain a target variable. A waveform processing unit (12) processes NMR measurements, signals, etc. An explanatory variable analysis unit (13) obtains explanatory variables from the amount of chemical shift and signal strength in the NMR measurements of the known sample. A model generation unit (14) determines the regression equation of the regression model of the target variable and the explanatory variables by partial least squares regression, and obtains regression model coefficients. A sample analysis unit (15) uses the regression model to calculate the triad fractions for an unknown copolymer sample from the amount of chemical shift and signal strength in the NMR measurements of the unknown copolymer sample. By using a copolymer for lithography in which the total of the triad fractions obtained in this way is not more than 20 mole % in the copolymer, a resist composition with excellent solubility and sensitivity can be manufactured.
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