Invention Grant
- Patent Title: Specimen holder for a charged particle microscope
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Application No.: US14977436Application Date: 2015-12-21
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Publication No.: US09741527B2Publication Date: 2017-08-22
- Inventor: Tomas Vystavel , Josef Sestak , Pavel Poloucek , Lubomir Tuma , Michal Hrouzek , Tomas Trnkocy , Martin Cafourek
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, P.C.
- Agent Michael O. Scheinberg
- Priority: EP14199616 20141222
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/26 ; H01J37/16

Abstract:
A specimen holder for a Charged Particle Microscope is disclosed. The holder has a support structure with an elongated member including a specimen mounting zone. The specimen mounting zone comprises a rotor with an axis perpendicular to the elongated member with a paddle connected to it which may be rotated. Specimens may be mounted on the paddle so that rotation of the paddle allows specimens to be rotated and/or inverted for microscopic observation on both sides. Specimens may either be directly mounted on the paddle, or on a grid, half-moon grid, lift-out grid, aperture frame, dielectric film, etc.
Public/Granted literature
- US20160181059A1 SPECIMEN HOLDER FOR A CHARGED PARTICLE MICROSCOPE Public/Granted day:2016-06-23
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