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    CHARGED PARTICLE MICROSCOPE FOR EXAMINING A SPECIMEN, AND METHOD OF DETERMINING AN ABERRATION OF SAID CHARGED PARTICLE MICROSCOPE
    1.
    发明申请
    CHARGED PARTICLE MICROSCOPE FOR EXAMINING A SPECIMEN, AND METHOD OF DETERMINING AN ABERRATION OF SAID CHARGED PARTICLE MICROSCOPE 审中-公开

    公开(公告)号：US20200152416A1

    公开(公告)日：2020-05-14

    申请号：US16680351

    申请日：2019-11-11

    Applicant: FEI Company

    Inventor： Lubomir Tuma

    IPC: H01J37/22

    Abstract: The invention relates to a method of determining an aberration of a charged particle microscope. The method comprises a step of providing a charged particle microscope that is at least partly operable by a user. Then, a set of image data is obtained with said charged particle microscope. The image data is processed to determine an aberration of said charged particle microscope. According to the invention, said set of image data is actively obtained by a user. In particular, the image data may be obtained during normal operation of the microscope by a user, which may include navigating and/or focusing of the microscope. Thus, the set of image data is acquired by said user, and not by the controller thereof. This allows background processing of an aberration, and aberration correction during use of the charged particle microscope. The invention further relates to a charged particle microscope incorporating the method.

    CHARGED PARTICLE MICROSCOPE FOR EXAMINING A SPECIMEN, AND METHOD OF DETERMINING AN ABERRATION OF SAID CHARGED PARTICLE MICROSCOPE
    3.
    发明申请
    CHARGED PARTICLE MICROSCOPE FOR EXAMINING A SPECIMEN, AND METHOD OF DETERMINING AN ABERRATION OF SAID CHARGED PARTICLE MICROSCOPE 有权

    公开(公告)号：US20240395496A1

    公开(公告)日：2024-11-28

    申请号：US18796013

    申请日：2024-08-06

    Applicant: FEI Company

    Inventor： Lubomir Tuma

    IPC: H01J37/22

    Abstract: The invention relates to a method of determining an aberration of a charged particle microscope. The method comprises a step of providing a charged particle microscope that is at least partly operable by a user. Then, a set of image data is obtained with said charged particle microscope. The image data is processed to determine an aberration of said charged particle microscope. According to the invention, said set of image data is actively obtained by a user. In particular, the image data may be obtained during normal operation of the microscope by a user, which may include navigating and/or focusing of the microscope. Thus, the set of image data is acquired by said user, and not by the controller thereof. This allows background processing of an aberration, and aberration correction during use of the charged particle microscope. The invention further relates to a charged particle microscope incorporating the method.

    CONTACTLESS TEMPERATURE MEASUREMENT IN A CHARGED PARTICLE MICROSCOPE
    6.
    发明申请
    CONTACTLESS TEMPERATURE MEASUREMENT IN A CHARGED PARTICLE MICROSCOPE 审中-公开
    在充电颗粒显微镜中的接近温度测量

    公开(公告)号：US20160133436A1

    公开(公告)日：2016-05-12

    申请号：US14939218

    申请日：2015-11-12

    Applicant: FEI Company

    Inventor： Jacob Simon Faber ,  Lubomir Tuma ,  Timothy Burnett ,  Libor Novak

    IPC: H01J37/26 ,  G01K11/30

    CPC classification number: H01J37/261 ,  G01K11/30 ,  H01J37/20 ,  H01J37/244 ,  H01J2237/2001 ,  H01J2237/2065 ,  H01J2237/28

    Abstract: Disclosed is a method of using a charged particle microscope for inspecting a sample mounted on a sample holder. The microscope is equipped with a solid state detector for detecting secondary particles emanating from the sample in response to irradiation of the sample with the primary beam, with the solid state detector in direct optical view of the sample. In some embodiments, the sample is mounted on a heater with a fast thermal response time. The method comprises contactless measurement of the temperature of the sample and/or sample holder using the solid state detector.

    Abstract translation: 公开了使用带电粒子显微镜来检查安装在样品架上的样品的方法。 显微镜配备有固态检测器，用于响应于初级束的样品照射而检测从样品发出的二次颗粒，固态检测器以样品的直接光学视图。 在一些实施例中，将样品安装在具有快速热响应时间的加热器上。 该方法包括使用固态检测器对样品和/或样品保持器的温度进行非接触式测量。

    Charged particle microscope for examining a specimen, and method of determining an aberration of said charged particle microscope
    7.
    发明授权
    Charged particle microscope for examining a specimen, and method of determining an aberration of said charged particle microscope 有权

    公开(公告)号：US12080512B2

    公开(公告)日：2024-09-03

    申请号：US16680351

    申请日：2019-11-11

    Applicant: FEI Company

    Inventor： Lubomir Tuma

    IPC: H01J37/22

    CPC classification number: H01J37/222 ,  H01J2237/2826

    Abstract: The invention relates to a method of determining an aberration of a charged particle microscope. The method comprises a step of providing a charged particle microscope that is at least partly operable by a user. Then, a set of image data is obtained with said charged particle microscope. The image data is processed to determine an aberration of said charged particle microscope. According to the invention, said set of image data is actively obtained by a user. In particular, the image data may be obtained during normal operation of the microscope by a user, which may include navigating and/or focusing of the microscope. Thus, the set of image data is acquired by said user, and not by the controller thereof. This allows background processing of an aberration, and aberration correction during use of the charged particle microscope. The invention further relates to a charged particle microscope incorporating the method.

    SPECIMEN HOLDER FOR A CHARGED PARTICLE MICROSCOPE
    9.
    发明申请
    SPECIMEN HOLDER FOR A CHARGED PARTICLE MICROSCOPE 有权
    充电颗粒显微镜样品座

    公开(公告)号：US20160181059A1

    公开(公告)日：2016-06-23

    申请号：US14977436

    申请日：2015-12-21

    Applicant: FEI Company

    Inventor： Tomas Vystavel ,  Josef Sestak ,  Pavel Poloucek ,  Lubomir Tuma ,  Michal Hrouzek ,  Tomas Trnkocy ,  Martin Cafourek

    IPC: H01J37/16

    CPC classification number: H01J37/16 ,  H01J37/20 ,  H01J37/26 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20278 ,  H01J2237/204 ,  H01J2237/206

    Abstract: A specimen holder for a Charged Particle Microscope, comprising: A support structure; An elongated member, a first end of which is connected to said support structure and the second end of which comprises a specimen mounting zone, the member having a longitudinal axis that extends along its length between said first and second ends, wherein said specimen mounting zone comprises: A rotor that is rotatable about a transverse axis extending substantially perpendicular to said longitudinal axis; A paddle connected to said rotor so as to be rotatable about said transverse axis, the paddle comprising a specimen mounting area; Driving means connected to said rotor, which can be invoked to rotate said paddle through a rotational range that allows the paddle to be inverted relative to an initial orientation thereof.

    Abstract translation: 一种带电粒子显微镜的标本支架，包括：支撑结构; 细长构件，其第一端连接到所述支撑结构，并且其第二端包括试样安装区，所述构件具有沿其长度在所述第一和第二端之间延伸的纵向轴线，其中所述试样安装区 包括：可围绕基本上垂直于所述纵向轴线延伸的横向轴线旋转的转子; 连接到所述转子以便围绕所述横向轴线旋转的桨叶，所述桨叶包括样品安装区域; 连接到所述转子的驱动装置，其可被调用以使所述桨叶旋转通过允许桨叶相对于其初始取向而倒转的旋转范围。

    Configurable Charged-Particle Apparatus
    10.
    发明申请
    Configurable Charged-Particle Apparatus 有权
    可配置的带电粒子装置

    公开(公告)号：US20140110597A1

    公开(公告)日：2014-04-24

    申请号：US14060170

    申请日：2013-10-22

    Applicant: FEI Company

    Inventor： Lubomir Tuma ,  Josef Sesták

    IPC: G21K5/08

    CPC classification number: G21K5/08 ,  H01J37/1413 ,  H01J37/20 ,  H01J37/265 ,  H01J2237/1035 ,  H01J2237/1415 ,  H01J2237/2802 ,  H01J2237/2813

    Abstract: The invention relates to a charged-particle apparatus having a charged particle source with an optical axis; a magnetic immersion lens comprising a first lens pole and a configurable magnetic circuit; and a first sample stage movable with respect to the optical axis. The apparatus has a first configuration to position the sample, mounted on the first stage, with respect to the optical axis and a second configuration, having a second lens pole mounted on the first stage and intersecting the optical axis, equipped with a second sample stage to position the sample between the two lens poles and is movable with respect to the optical axis, causing the optical properties of the magnetic immersion lens to differ in the two configurations, and can, in the second configuration, be changed by positioning the second lens pole using the first stage, thus changing the magnetic circuit.

    Abstract translation: 本发明涉及具有光轴的带电粒子源的带电粒子装置; 一种包含第一透镜柱和可配置磁路的磁浸透镜; 以及可相对于光轴移动的第一样品台。 该装置具有第一配置，用于相对于光轴定位安装在第一台上的样品，并且具有第二配置，其具有安装在第一台上并与光轴相交的第二透镜杆，该第二透镜杆装备有第二样品台 将样品定位在两个透镜杆之间并且可相对于光轴移动，导致两种结构中的浸没透镜的光学特性不同，并且可以在第二构造中通过将第二透镜 使用第一级，从而改变磁路。

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