Invention Grant
- Patent Title: Apparatus and method for accurate measurement and mapping of forward and reverse-bias current-voltage characteristics of large area lateral p-n junctions
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Application No.: US14475330Application Date: 2014-09-02
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Publication No.: US09746514B2Publication Date: 2017-08-29
- Inventor: Ian Sierra Gabriel Kelly-Morgan , Vladimir N. Faifer , James A. Real , Biren Salunke , Ralph Nyffenegger
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01R31/10
- IPC: G01R31/10 ; G01R31/26 ; G01N27/00 ; H01L21/66 ; G01N33/00 ; G01R1/07 ; G01R27/08

Abstract:
Methods and apparatus for providing measurements in p-n junctions and taking into account the lateral current for improved accuracy are disclosed. The lateral current may be controlled, allowing the spreading of the current to be reduced or substantially eliminated. Alternatively or additionally, the lateral current may be measured, allowing a more accurate normal current to be calculated by compensating for the measured spreading. In addition, the techniques utilized for controlling the lateral current and the techniques utilized for measuring the lateral current may also be implemented jointly.
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