公开(公告)号：US09746514B2

公开(公告)日：2017-08-29

申请号：US14475330

申请日：2014-09-02

Applicant: KLA-Tencor Corporation

Inventor： Ian Sierra Gabriel Kelly-Morgan ,  Vladimir N. Faifer ,  James A. Real ,  Biren Salunke ,  Ralph Nyffenegger

IPC: G01R31/10 ,  G01R31/26 ,  G01N27/00 ,  H01L21/66 ,  G01N33/00 ,  G01R1/07 ,  G01R27/08

CPC classification number: G01R31/2648 ,  G01N27/00 ,  G01N2033/0095 ,  G01R1/07 ,  G01R27/08 ,  G01R31/2632 ,  H01L22/14

Abstract: Methods and apparatus for providing measurements in p-n junctions and taking into account the lateral current for improved accuracy are disclosed. The lateral current may be controlled, allowing the spreading of the current to be reduced or substantially eliminated. Alternatively or additionally, the lateral current may be measured, allowing a more accurate normal current to be calculated by compensating for the measured spreading. In addition, the techniques utilized for controlling the lateral current and the techniques utilized for measuring the lateral current may also be implemented jointly.

公开(公告)号：US20150061714A1

公开(公告)日：2015-03-05

申请号：US14475330

申请日：2014-09-02

Applicant: KLA-Tencor Corporation

Inventor： Ian Sierra Gabriel Kelly-Morgan ,  Vladimir N. Faifer ,  James A. Real ,  Biren Salunke ,  Ralph Nyffenegger

IPC: G01R1/067 ,  G01R31/26 ,  G01N33/00 ,  G01N27/00

CPC classification number: G01R31/2648 ,  G01N27/00 ,  G01N2033/0095 ,  G01R1/07 ,  G01R27/08 ,  G01R31/2632 ,  H01L22/14

Abstract: Methods and apparatus for providing measurements in p-n junctions and taking into account the lateral current for improved accuracy are disclosed. The lateral current may be controlled, allowing the spreading of the current to be reduced or substantially eliminated. Alternatively or additionally, the lateral current may be measured, allowing a more accurate normal current to be calculated by compensating for the measured spreading. In addition, the techniques utilized for controlling the lateral current and the techniques utilized for measuring the lateral current may also be implemented jointly.

Abstract translation: 公开了用于在p-n结中提供测量并考虑横向电流以提高精度的方法和装置。 可以控制横向电流，允许电流的扩展被减小或基本上消除。 或者或另外，可以测量横向电流，允许通过补偿测量的扩展来计算更精确的正常电流。 此外，用于控制横向电流的技术和用于测量横向电流的技术也可以联合实现。