Invention Grant
- Patent Title: Lower dose rate ion implantation using a wider ion beam
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Application No.: US14312617Application Date: 2014-06-23
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Publication No.: US09748072B2Publication Date: 2017-08-29
- Inventor: Zhimin Wan , Rekha Padmanabhan , Xiao Bai , Gary N. Cai , Ching-I Li , Ger-Pin Lin , Shao-Yu Hu , David Hoglund , Robert E. Kaim , Kourosh Saadatmand
- Applicant: Advanced Ion Beam Technology, Inc.
- Applicant Address: TW Hsin-Chu
- Assignee: ADVANCED ION BEAM TECHNOLOGY, INC.
- Current Assignee: ADVANCED ION BEAM TECHNOLOGY, INC.
- Current Assignee Address: TW Hsin-Chu
- Agency: Morrison & Foerster LLP
- Main IPC: H01J37/08
- IPC: H01J37/08 ; H01J37/317

Abstract:
In an exemplary process for lower dose rate ion implantation of a work piece, an ion beam may be generated using an ion source and an extraction manipulator. The extraction manipulator may be positioned at a gap distance from an exit aperture of the ion source. A current of the ion beam exiting the extraction manipulator may be maximized when the extraction manipulator is positioned at an optimal gap distance from the exit aperture. The gap distance at which the extraction manipulator is positioned from the exit aperture may differ from the optimal gap distance by at least 10 percent. A first potential may be applied to a first set of electrodes. An x-dimension of the ion beam may increase as the ion beam passes through the first set of electrodes. The work piece may be positioned in the ion beam to implant ions into the work piece.
Public/Granted literature
- US20150371857A1 LOWER DOSE RATE ION IMPLANTATION USING A WIDER ION BEAM Public/Granted day:2015-12-24
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