Invention Grant
- Patent Title: Methods of fabricating pellicles using supporting layer
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Application No.: US14972258Application Date: 2015-12-17
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Publication No.: US09753367B2Publication Date: 2017-09-05
- Inventor: Munja Kim , Ji-Beom Yoo , Sooyoung Kim , Taesung Kim , Dong-Wook Shin , Hwanchul Jeon , Seul-Gi Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.,Research & Business Foundation Sungkyunkwan University
- Current Assignee: Samsung Electronics Co., Ltd.,Research & Business Foundation Sungkyunkwan University
- Current Assignee Address: KR Gyeonggi-do KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2015-0002170 20150107
- Main IPC: G03F1/64
- IPC: G03F1/64 ; G03F1/62 ; C23C16/26
Abstract:
The method includes forming a graphite layer on a substrate, forming a supporting layer on the graphite layer to form a stack of the graphite layer and the supporting layer, removing the substrate to separate the stack from the substrate, transferring the stack of the graphite layer and the supporting layer onto a frame, and removing the supporting layer from the frame.
Public/Granted literature
- US20160195804A1 METHODS OF FABRICATING PELLICLES USING SUPPORTING LAYER Public/Granted day:2016-07-07
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