公开(公告)号：US10747104B2

公开(公告)日：2020-08-18

申请号：US15690879

申请日：2017-08-30

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Mun-Ja Kim ,  Ji-Beom Yoo ,  Soo-Young Kim ,  Hee-Bom Kim ,  Hwan-Chul Jeon ,  Seul-Gi Kim ,  Tae-Sung Kim ,  Dong-Wook Shin

IPC: G03F1/64

Abstract: A method of manufacturing a pellicle includes preparing a pellicle frame having an adhesive layer coated thereon, treating a pellicle membrane with vapor under vapor atmosphere, attaching the pellicle membrane onto the pellicle frame, and drying the pellicle membrane.

公开(公告)号：US11067887B2

公开(公告)日：2021-07-20

申请号：US16918106

申请日：2020-07-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Mun-Ja Kim ,  Ji-Beom Yoo ,  Soo-Young Kim ,  Hee-Bom Kim ,  Hwan-Chul Jeon ,  Seul-Gi Kim ,  Tae-Sung Kim ,  Dong-Wook Shin

IPC: G03F1/64

Abstract: A method of manufacturing a pellicle includes preparing a pellicle frame having an adhesive layer coated thereon, treating a pellicle membrane with vapor under vapor atmosphere, attaching the pellicle membrane onto the pellicle frame, and drying the pellicle membrane.

公开(公告)号：US09753367B2

公开(公告)日：2017-09-05

申请号：US14972258

申请日：2015-12-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Munja Kim ,  Ji-Beom Yoo ,  Sooyoung Kim ,  Taesung Kim ,  Dong-Wook Shin ,  Hwanchul Jeon ,  Seul-Gi Kim

IPC: G03F1/64 ,  G03F1/62 ,  C23C16/26

CPC classification number: G03F1/62 ,  C23C16/26

Abstract: The method includes forming a graphite layer on a substrate, forming a supporting layer on the graphite layer to form a stack of the graphite layer and the supporting layer, removing the substrate to separate the stack from the substrate, transferring the stack of the graphite layer and the supporting layer onto a frame, and removing the supporting layer from the frame.