Invention Grant
- Patent Title: Exposure apparatus and exposure method using the same
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Application No.: US14453040Application Date: 2014-08-06
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Publication No.: US09753376B2Publication Date: 2017-09-05
- Inventor: Jae-Weon Hur , Hong-Yeon Lee , Baek-Kyun Jeon
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2014-0016550 20140213
- Main IPC: G03B27/58
- IPC: G03B27/58 ; G03F7/20 ; G02F1/13 ; G02F1/1337
Abstract:
An exposure apparatus including a substrate transporting unit configured to transport a substrate in a first direction, and including a first measuring part; and an exposure part disposed over the substrate transporting unit configured to irradiate the substrate with ultraviolet rays. The first measuring part is configured to measure an intensity of the ultraviolet rays before the substrate is irradiated.
Public/Granted literature
- US09791783B2 Exposure apparatus and exposure method using the same Public/Granted day:2017-10-17
Information query
