公开(公告)号：US09791783B2

公开(公告)日：2017-10-17

申请号：US14453040

申请日：2014-08-06

Applicant: Samsung Display Co., Ltd.

Inventor： Jae-Weon Hur ,  Hong-Yeon Lee ,  Baek-Kyun Jeon

IPC: G03B27/58 ,  G03F7/20 ,  G02F1/13 ,  G02F1/1337

CPC classification number: G03F7/70191 ,  G02F1/1303 ,  G02F1/133788

Abstract: An exposure apparatus including a substrate transporting unit configured to transport a substrate in a first direction, and including a first measuring part; and an exposure part disposed over the substrate transporting unit configured to irradiate the substrate with ultraviolet rays. The first measuring part is configured to measure an intensity of the ultraviolet rays before the substrate is irradiated.

公开(公告)号：US09753376B2

公开(公告)日：2017-09-05

申请号：US14453040

申请日：2014-08-06

Applicant: Samsung Display Co., Ltd.

Inventor： Jae-Weon Hur ,  Hong-Yeon Lee ,  Baek-Kyun Jeon

IPC: G03B27/58 ,  G03F7/20 ,  G02F1/13 ,  G02F1/1337

Abstract: An exposure apparatus including a substrate transporting unit configured to transport a substrate in a first direction, and including a first measuring part; and an exposure part disposed over the substrate transporting unit configured to irradiate the substrate with ultraviolet rays. The first measuring part is configured to measure an intensity of the ultraviolet rays before the substrate is irradiated.