公开(公告)号：US09791783B2

公开(公告)日：2017-10-17

申请号：US14453040

申请日：2014-08-06

Applicant: Samsung Display Co., Ltd.

Inventor： Jae-Weon Hur ,  Hong-Yeon Lee ,  Baek-Kyun Jeon

IPC: G03B27/58 ,  G03F7/20 ,  G02F1/13 ,  G02F1/1337

CPC classification number: G03F7/70191 ,  G02F1/1303 ,  G02F1/133788

Abstract: An exposure apparatus including a substrate transporting unit configured to transport a substrate in a first direction, and including a first measuring part; and an exposure part disposed over the substrate transporting unit configured to irradiate the substrate with ultraviolet rays. The first measuring part is configured to measure an intensity of the ultraviolet rays before the substrate is irradiated.

公开(公告)号：US09753376B2

公开(公告)日：2017-09-05

申请号：US14453040

申请日：2014-08-06

Applicant: Samsung Display Co., Ltd.

Inventor： Jae-Weon Hur ,  Hong-Yeon Lee ,  Baek-Kyun Jeon

IPC: G03B27/58 ,  G03F7/20 ,  G02F1/13 ,  G02F1/1337

Abstract: An exposure apparatus including a substrate transporting unit configured to transport a substrate in a first direction, and including a first measuring part; and an exposure part disposed over the substrate transporting unit configured to irradiate the substrate with ultraviolet rays. The first measuring part is configured to measure an intensity of the ultraviolet rays before the substrate is irradiated.

公开(公告)号：US20150227056A1

公开(公告)日：2015-08-13

申请号：US14453040

申请日：2014-08-06

Applicant: Samsung Display Co., Ltd.

Inventor： Jae-Weon HUR ,  Hong-Yeon Lee ,  Baek-Kyun Jeon

IPC: G03F7/20

CPC classification number: G03F7/70191 ,  G02F1/1303 ,  G02F1/133788

Abstract: An exposure apparatus including a substrate transporting unit configured to transport a substrate in a first direction, and including a first measuring part; and an exposure part disposed over the substrate transporting unit configured to irradiate the substrate with ultraviolet rays. The first measuring part is configured to measure an intensity of the ultraviolet rays before the substrate is irradiated.

Abstract translation: 一种曝光装置，包括：基板传送单元，被配置为沿第一方向传送基板，并且包括第一测量部; 以及设置在所述基板输送单元上的曝光部，所述曝光部被构造成用紫外线照射所述基板。 第一测量部件被配置为在照射基板之前测量紫外线的强度。