Invention Grant
- Patent Title: Systems and methods for fabricating a polycrystaline semiconductor resistor on a semiconductor substrate
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Application No.: US14297008Application Date: 2014-06-05
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Publication No.: US09761461B2Publication Date: 2017-09-12
- Inventor: Zhonghai Shi , Vince Deems , Hong Tian
- Applicant: Cirrus Logic, Inc.
- Applicant Address: US TX Austin
- Assignee: Cirrus Logic, Inc.
- Current Assignee: Cirrus Logic, Inc.
- Current Assignee Address: US TX Austin
- Agency: Jackson Walker L.L.P.
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/3205 ; H01L21/762 ; H01L27/08 ; H01L49/02 ; H01L21/763

Abstract:
In accordance with embodiments of the present disclosure, an integrated circuit may include at least one region of shallow-trench isolation field oxide, at least one region of dummy diffusion, and a polycrystalline semiconductor resistor. The at least one region of shallow-trench isolation field oxide may be formed on a semiconductor substrate. The at least one region of dummy diffusion may be formed adjacent to the at least one region of shallow-trench isolation field oxide on the semiconductor substrate. The polycrystalline semiconductor resistor may comprise at least one resistor arm formed with a polycrystalline semiconductor material, wherein the at least one resistor arm is formed over each of the at least one region of shallow-trench isolation field oxide and the at least one region of dummy diffusion.
Public/Granted literature
- US20150303246A1 SYSTEMS AND METHODS FOR FABRICATING A POLYCRYSTALINE SEMICONDUCTOR RESISTOR ON A SEMICONDUCTOR SUBSTRATE Public/Granted day:2015-10-22
Information query
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