SYSTEMS AND METHODS FOR FABRICATING A POLYCRYSTALINE SEMICONDUCTOR RESISTOR ON A SEMICONDUCTOR SUBSTRATE
    1.
    发明申请
    SYSTEMS AND METHODS FOR FABRICATING A POLYCRYSTALINE SEMICONDUCTOR RESISTOR ON A SEMICONDUCTOR SUBSTRATE 有权
    在半导体基板上制造多晶硅半导体电阻的系统和方法

    公开(公告)号:US20150303246A1

    公开(公告)日:2015-10-22

    申请号:US14297008

    申请日:2014-06-05

    Abstract: In accordance with embodiments of the present disclosure, an integrated circuit may include at least one region of shallow-trench isolation field oxide, at least one region of dummy diffusion, and a polycrystalline semiconductor resistor. The at least one region of shallow-trench isolation field oxide may be formed on a semiconductor substrate. The at least one region of dummy diffusion may be formed adjacent to the at least one region of shallow-trench isolation field oxide on the semiconductor substrate. The polycrystalline semiconductor resistor may comprise at least one resistor arm formed with a polycrystalline semiconductor material, wherein the at least one resistor arm is formed over each of the at least one region of shallow-trench isolation field oxide and the at least one region of dummy diffusion.

    Abstract translation: 根据本公开的实施例,集成电路可以包括浅沟槽隔离场氧化物的至少一个区域,至少一个虚拟扩散区域和多晶半导体电阻器。 浅沟槽隔离场氧化物的至少一个区域可以形成在半导体衬底上。 可以在半导体衬底上的浅沟槽隔离场氧化物的至少一个区域附近形成虚拟扩散的至少一个区域。 多晶半导体电阻器可以包括形成有多晶半导体材料的至少一个电阻臂,其中至少一个电阻臂形成在浅沟槽隔离场氧化物的至少一个区域中的每一个上,并且虚拟的至少一个区域 扩散。

    Systems and methods for fabricating a polycrystaline semiconductor resistor on a semiconductor substrate

    公开(公告)号:US10068779B2

    公开(公告)日:2018-09-04

    申请号:US15675242

    申请日:2017-08-11

    Abstract: In accordance with embodiments of the present disclosure, an integrated circuit may include at least one region of shallow-trench isolation field oxide, at least one region of dummy diffusion, and a polycrystalline semiconductor resistor. The at least one region of shallow-trench isolation field oxide may be formed on a semiconductor substrate. The at least one region of dummy diffusion may be formed adjacent to the at least one region of shallow-trench isolation field oxide on the semiconductor substrate. The polycrystalline semiconductor resistor may comprise at least one resistor arm formed with a polycrystalline semiconductor material, wherein the at least one resistor arm is formed over each of the at least one region of shallow-trench isolation field oxide and the at least one region of dummy diffusion.

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