Invention Grant
- Patent Title: Stylo-epitaxial piezoelectric and ferroelectric devices and method of manufacturing
-
Application No.: US14219028Application Date: 2014-03-19
-
Publication No.: US09761785B2Publication Date: 2017-09-12
- Inventor: Glen R Fox , Ronald G. Polcawich , Daniel M Potrepka , Luz M Sanchez
- Applicant: U.S. Army Research Laboratory ATTN: RDRL-LOC-I
- Applicant Address: US DC Washington
- Assignee: The United States of America as represented by the Secretary of the Army
- Current Assignee: The United States of America as represented by the Secretary of the Army
- Current Assignee Address: US DC Washington
- Agent Lawrence E. Anderson
- Main IPC: H01L41/08
- IPC: H01L41/08 ; H01L41/319 ; H01L41/187 ; H01L41/316 ; C30B29/32 ; C30B23/02 ; C30B25/18 ; C23C18/12

Abstract:
A ferroelectric device comprising a substrate;a textured layer; a first electrode comprising a thin layer of metallic material having a crystal lattice structure divided into granular regions; a seed layer; the seed layer being epitaxially deposited so as to form a column-like structure on top of the granular regions of the first electrode; at least one ferroelectric material layer exhibiting spontaneous polarization epitaxially deposited on the seed layer; the ferroelectric material layer, the seed layer, and first electrode each having granular regions in which column-like structures produce a high degree of polarization normal to the growth plane and a method of making.
Public/Granted literature
- US20140265734A1 Stylo-Epitaxial Piezoelectric and Ferroelectric Devices and Method of Manufacturing Public/Granted day:2014-09-18
Information query
IPC分类: